2020
DOI: 10.14500/aro.10671
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Calculation of Electron Swarm Parameters in Tetrafluoromethane

Abstract: The electron swarm parameters and electron energy distribution function (EEDF) are necessary, especially onunderstanding quantitatively plasma phenomena and ionized gases. The EEDF and electron swarm parameters including the reduce effective ionization coefficient (α-η)/N (α and η are the ionization and attachment coefficient, respectively), electron drift velocity, electron mean energy, characteristic energy, density  normalized longitudinal diffusion coefficient, and density normalized electron mobility in t… Show more

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