1983
DOI: 10.1063/1.332797
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Calculation of electron swarm parameters in fluorine

Abstract: Swarm parameters of electrons have been calculated for fluorine by a Monte Carlo simulation and the Boltzmann equation method for the first time. Values of these parameters have been obtained for ratios of the electric field to the gas number density E/N from 100 to 3000 Td (E/p0 =35∼1000 V/cm Torr). Available experimental and theoretical cross sections were used for the calculations.

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Cited by 102 publications
(30 citation statements)
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“…When dissociation occurs, the critical breakdown field gradually decreases as the temperature increases. Our calculated values are consistent with the measurement of SF 6 breakdown field at the room temperature, 44 data. The different pressures at which the experimental and calculation results were obtained also contribute to the differences between the results.…”
Section: Comparison With Literature Datasupporting
confidence: 92%
See 1 more Smart Citation
“…When dissociation occurs, the critical breakdown field gradually decreases as the temperature increases. Our calculated values are consistent with the measurement of SF 6 breakdown field at the room temperature, 44 data. The different pressures at which the experimental and calculation results were obtained also contribute to the differences between the results.…”
Section: Comparison With Literature Datasupporting
confidence: 92%
“…39,40 The total ionization cross section for SF, SF 2 , SF 3 , SF 4 , and SF 5 calculated by the recently developed binary-encounter-Bethe (BEB) model, was used for their consistency. 41 For the sets of collision cross sections for electron/SF 6 , electron/F 2 , electron/S, and electron/F, the basic data used for the compilation are from Cliteur et al, 14 Yousfi et al, 15 Itoh et al, 42 Miller et al, 43 Hayashi and Nimura, 44 Morgan, 45 and references given therein. The electron/F and electron/S sets were then completed by adding the attachment cross sections corresponding to radiative attachment (i.e., e À þ F !…”
Section: A Cross Section Datamentioning
confidence: 99%
“…The electron collision cross sections of F 2 (Hayashi and Nimura 1983); q m , momentum transfer; q i , ionization; q a , attachment; q v , vibrational excitation; q e1 through q e4 , electronic excitation; and q t , total.…”
Section: Discussionmentioning
confidence: 99%
“…the total collision frequency does not change signiåcantly under the conditions examined here. The set of the electron collision cross sections of F 2 taken from Hayashi and Nimura (1983) is shown in ågure 7. The approximate CCF feature is probably due to the gradient d lg q t =d lg èclose to Ä 1 2 in a range from a few electronvolts to tens electronvolts around which a major part of the electron energy distribution lies.…”
Section: Fmentioning
confidence: 99%
“…A wide variety of methods have been employed in this effort. These include full numerical solutions of the Boltzmann Equation [1] , particle methods [2,3] and fluid models [4][5][6][7][8] . In this paper, a model combines the fluid theory and kinetic theory [9][10][11] was adopted.…”
Section: Introductionmentioning
confidence: 99%