Calculation of discharge parameters in low-pressure diode-type radio frequency noble gas plasmas

Orlov, K. E.; Смирнов, А. С.

doi:10.1088/0963-0252/8/1/005

Cited by 16 publications

(24 citation statements)

References 17 publications

(50 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The calculations based on the two-step ion density profile model are known to yield discharge characteristics in good agreement with experimental data and full-scale simulations [18].…”

Section: B Large Amplitude Electric Fieldsupporting

confidence: 59%

“…( 23) always reflects electrons, the electrons never enter the region of the large sheath electric field, which is opposite to the case of obliquely incident waves. The calculations based on the two-step ion density profile model are known to yield discharge characteristics in good agreement with experimental data and full-scale simulations [18].…”

Section: B Large Amplitude Electric Fieldsupporting

confidence: 59%

See 1 more Smart Citation

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Kaganovich

Polomarov

Theodosiou

2005

View full text Add to dashboard Cite

Radio frequency waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer.Electrons can transport the plasma current away from the skin layer due to their thermal motion.As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, nonlocal theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma.

show abstract

“…The calculations based on the two-step ion density profile model are known to yield discharge characteristics in good agreement with experimental data and full-scale simulations [18].…”

Section: B Large Amplitude Electric Fieldsupporting

confidence: 59%

Section: B Large Amplitude Electric Fieldsupporting

confidence: 59%

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Kaganovich

Polomarov

Theodosiou

2005

View full text Add to dashboard Cite

show abstract

“…A reasonable agreement between simulation and measurements can be observed. According to (18), for this kind of discharge, the non-monotonous behavior of the T eff is related to the change of the electron heating mechanism from the stochastic regime at low pressures to the collisional regime at higher gas pressures. …”

Section: Resultsmentioning

confidence: 99%

Particle-in-Cell Simulation at Low Pressure Oxygen Discharges: Comparison with Experimental Data

Parada¹,

Pessoa

Roberto³

et al. 2010

ECS Trans.

View full text Add to dashboard Cite

The structure of molecular oxygen discharge generated by a capacitively coupled reactor was experimentally investigated using a Langmuir probe and the results were compared to the Particle-inCell (PIC) simulation. The electron energy distribution functions (EEDF) were measured for a pressure range of 10 to 100 mTorr, keeping the power injected into the plasma at about 50 and 200W. The simulation calculated the EEDFs taking into account three main charged particle species presented in oxygen plasma: electron, O -and O 2 + . The PIC simulation gives the specie profiles; however is time-consuming for discharges with many species such as oxygen discharges. Despite that, the order of magnitude is the same as the experimental data. The simulation results show that the cold and hot electron temperatures are in a good agreement with the experimental data. Moreover, the results indicate that the EEDFs measured at lower pressures are bi-Maxwellian distributions.

show abstract

“…They emphasized that full quantitative experiment and improved model are required to find the dominant factor and to provide a basis for the universal physics for the hysteresis. Some studies included non-local kinetic effect in the plasma analysis to explain steady state solution in capacitive discharges 20 21 . After their work, numerous studies were conducted to find the main cause for the hysteresis by examining possibilities such as the stepwise ionization effect 22 or the external circuit effect 23 .…”

mentioning

confidence: 99%

Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment and Modeling

Lee

Chung

2015

Sci Rep

View full text Add to dashboard Cite

Hysteresis, which is the history dependence of physical systems, is one of the most important topics in physics. Interestingly, bi-stability of plasma with a huge hysteresis loop has been observed in inductive plasma discharges. Despite long plasma research, how this plasma hysteresis occurs remains an unresolved question in plasma physics. Here, we report theory, experiment, and modeling of the hysteresis. It was found experimentally and theoretically that evolution of the electron energy distribution (EED) makes a strong plasma hysteresis. In Ramsauer and non-Ramsauer gas experiments, it was revealed that the plasma hysteresis is observed only at high pressure Ramsauer gas where the EED deviates considerably from a Maxwellian shape. This hysteresis was presented in the plasma balance model where the EED is considered. Because electrons in plasmas are usually not in a thermal equilibrium, this EED-effect can be regarded as a universal phenomenon in plasma physics.

show abstract

Calculation of discharge parameters in low-pressure diode-type radio frequency noble gas plasmas

Cited by 16 publications

References 17 publications

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Particle-in-Cell Simulation at Low Pressure Oxygen Discharges: Comparison with Experimental Data

Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment and Modeling

Contact Info

Product

Resources

About