Calculation of depth distribution functions for characteristic x‐radiation using an electron scattering model. II—results

Abstract

Results obtained from the model of multiple electron reflection are compared with experimental data and values calculated using analytical expressions commonly used in electron probe microanalysis. It is shown that the proposed model quantifies the total amount of generated x‐ray intensity very accurately, the root mean square error obtained from comparison with Pouchou and Pichoir's results being 2.33%. The shape of the depth distribution functions is also predicted very well, as is illustrated by a comprehensive comparison with measured data and with curves obtained from the expressions of Bastin and Heijligers and of Pouchou and Pichoir. Characteristics of the calculated curves and experimental errors affecting the shape of measured depth distribution functions are discussed.

IntriX: a numerical model for electron probe analysis at high depth resolution. Part II—tests and confrontation with experiments

“…The agreement between measured and calculated curves is satisfactory. Such comparisons between Brown and ParobeckÏs experimental data and EPMA models have already been established in a paper by August and Wernisch 15. The models compared were the parabolic analytical model by Pouchou and Pichoir,16 the Gaussian analytical model by Bastin and Heijligers17 and the electron scat-…”

Quantitative EPMA of element depth distribution

“…Another approach to calculation of the depth distribution function was presented recently by August and Wernisch [23,24] and August [25,26]. This approach follows from a rigorous definition of the ~(z) function and involves the backscattering and transmission coefficients, the angular and energy distribution of the electrons and the ionization cross-section.…”