Calculation of Boron Nitride Sputter Yields Under Low Energy Xenon Ion Bombardment

Abstract

An accurate description of the sputter yield of boron nitride (BN) from xenon ion bombardment at low energies is needed for improving the prediction capabilities of Hall thruster erosion models and in turn for lifetime prediction models. However, sputter yield data at low (< 300 eV) energies does not exist. The molecular dynamics method is employed to model the sputtering of BN at low energies. The results are compared to existing experimental data at higher energies. A qualitative comparison with a quantumstatistical model is also performed.

Large-angle xenon ion scattering in Xe-propelled electrostatic thrusters: differential cross sections

“…A number of studies have investigated xenon ion sputtering yields for several materials [29][30][31][32][33][34][35]. The most commonly studied material has been molybdenum (Mo), the material for ion thruster acceleration grids.…”

“…The most commonly used insulator material is boron nitride. Sputtering yields for Xe ion beams impinging on boron nitride surfaces have been reported at ion energies above 200 eV [32,33,[38][39][40]. The sputtering yields on boron nitride are found to increase by a factor of ∼1.5 when the Xe ion kinetic energy is increased from 270 to 540 eV at normal incidence [32,38].…”

“…Sputtering yields for Xe ion beams impinging on boron nitride surfaces have been reported at ion energies above 200 eV [32,33,[38][39][40]. The sputtering yields on boron nitride are found to increase by a factor of ∼1.5 when the Xe ion kinetic energy is increased from 270 to 540 eV at normal incidence [32,38]. Assuming α = 0.8, the present large-angle differential cross sections indicate that only ∼8% of observed boron nitride sputtering can be attributed to doubly charged ions.…”

Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique

“…1,[72][73][74][75][76][77] Detailed erosion mechanisms have been investigated after Xe plasma irradiation. 22,78,79) In addition to the first-principles calculations performed to reveal the nature of the BN structure, 80,81) molecular dynamics simulations [82][83][84][85][86][87] have been performed to clarify the sputtering dynamics. The sputtering yield under ion irradiation has been assessed 88) using the stopping and range of ions in matter software.…”