2015
DOI: 10.1016/j.apsusc.2015.01.175
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Calculation and synthesis of ZrC by CVD from ZrCl4–C3H6–H2–Ar system with high H2 percentage

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Cited by 23 publications
(9 citation statements)
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“…The effect of reactor total pressure on the growth and structure of ZrC layers has also been reported by Zhu et al [17]. However, to our knowledge, no study has been reported on the effect of ZrCl 4 partial pressure on the growth and structure of ZrC grown by thermal CVD.…”
supporting
confidence: 66%
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“…The effect of reactor total pressure on the growth and structure of ZrC layers has also been reported by Zhu et al [17]. However, to our knowledge, no study has been reported on the effect of ZrCl 4 partial pressure on the growth and structure of ZrC grown by thermal CVD.…”
supporting
confidence: 66%
“…The influence of substrate-inlet gap on the growth characteristics of ZrC layers has been reported in [13]. Several researchers have studied the effect of the carbon source (especially CH 4 and C 3 H 6 ) [14,17,18] and hydrogen flow rates [17,19] on the properties of ZrC layers.…”
mentioning
confidence: 99%
“…The layer is composed of ZrC (COD 96-900-8778) and amorphous carbon. In the comparison with the research done by Yan Zhu et al [12] , ZrC will start to be formed at the temperature of 750 K (500 o C). Below 1100 o C, it seems that the carbon atoms in the coating layer gains insufficient energy to diffuse into zircaloy surface for the formation of carbide phase.…”
Section: Resultsmentioning
confidence: 99%
“…It is used in some hi-tech areas such as coating layer of High Temperature Gas-cooled Reactor (HTGR) nuclear fuel [9][10] , used in aerospace industry and coating of fire line shell in all the longrange missiles [10] . Based on ZrC phase diagram in Figure 1 and yield of ZrC deposition in Figure 2 show that ZrC film will be formed at temperature ranging of 500 o C to 3500 o C [11][12] . Figure 1.…”
Section: Introductionmentioning
confidence: 99%
“…These exceptional properties, which include ultra-high melting point (3540 °C), good resistance to high-speed gas or particle erosion and good ablation resistance 2 , make ZrC suitable for many applications, such as cutting tools, wear resistant components, field emitters, thermophotovoltaic radiators and diffusion barrier coatings on nuclear particle fuels for the nuclear industry 3 . On the other hand, silicon carbide (SiC) is a ceramic already widely used, particularly as an abrasive and in composites used for high-temperature structural applications 4 , with potential applications in field emitters, FETs, NEMS devices, catalysts and microwave absorbers 5 .…”
Section: Introductionmentioning
confidence: 99%