CAD challenges for microsensors, microactuators, and microsystems

Abstract

In parallel with the development of new technologies, new device configurations, and new applications for microsensors, microactuators, and microsystems, also referred to as microelectromechanical devices and systems (MEMS), there has arisen a growing need for computer-aided engineering and design systems. There is a wide range of design problems: process simulation, solid-body geometric renderings from photomasks and process descriptions, energetically correct simulation of behavior across multiple coupled energy domains, extraction of lumped low-order models of device behavior, optimization of geometry and process sequence, and design of full systems that include MEMS devices. Because of the computational demands of the modeling required to support full computer-aided design (CAD), there is a premium on fast and memory-efficient algorithms that help the designer, both by automating, where possible, complex sets of related tasks and by providing rapid computational prototyping at critical points in the design cycle. This paper presents an overview of the present state of the art in CAD for MEMS, with particular emphasis on the role of macromodels and test structures as part of the design environment.

Emerging simulation approaches for micromachined devices

“…Generating the form of these models requires the device designer's physical insight, and can be as much art as science, though issues such as energy conservation can provide guidelines [14]. Once the form of the macromodel has been discerned, then values for the parameters must be determined.…”

Static, Vibration, and Buckling Analysis of Nanobeams

“…In these structures, micro beams and micro tubes are widely used in nanoscale electromechanical systems such as sensors (Zook et al [1], Pei et al [2]), actuators (Senturia [3], Rezazadeh et al [4]). In investigation of micro and nanostructures, the classical continuum mechanics are not effort of describing of the size-dependent mechanics.…”

A Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator

“…A system-level simulation of MEMS actuators along with peripheral electronics is required in order to design and optimize the performance of the system. Modeling and simulation of MEMS actuators usually involves use of multi-domain analysis tools [4] such as MATLAB [5], ANSYS [6,7] and SUGAR [8]. In order to design and optimize a system with MEMS actuators and associated electronics in an IC design environment, the designers manually pass on the MEMS actuator performance parameters for circuit simulation, which is time consuming and error prone.…”