C6.4 - Simulation of Damping Effects in Irregularly Perforated MEMS Devices by Physical Compact Modeling

Abstract

Accurate modeling of damping effects in high-end MEMS devices is a major challenge due to low feature sizes and complex device geometries. By applying a finite network approach with specially derived compact models, we are able to simulate structures with varying perforation patterns and account for the impact of the transition regions between differently perforated areas. Simulations of exemplary test structures with different perforation sizes and patterns prove the feasibility of our approach, which perspectively improves the accuracy of damping estimation beyond state of the art.