In this paper, the deposition of C 20 fullerenes on a diamond (001)-(2ϫ1) surface and the fabrication of C 20 thin film at 100 K were investigated by a molecular dynamics ͑MD͒ simulation using the many-body Brenner bond order potential. First, we found that the collision dynamic of a single C 20 fullerene on a diamond surface was strongly dependent on its impact energy. Within the energy range 10-45 eV, the C 20 fullerene chemisorbed on the surface retained its free cage structure. This is consistent with the experimental observation, where it was called the memory effect in ''C 20 -type'' films ͓P. Melion et al., Int. J. Mod. B 9, 339 ͑1995͒; P. Milani et al., Cluster Beam Synthesis of Nanostructured Materials ͑Springer, Berlin, 1999͔͒. Next, more than one hundred C 20 ͑10-25 eV͒ were deposited one after the other onto the surface. The initial growth stage of C 20 thin film was observed to be in the three-dimensional island mode. The randomly deposited C 20 fullerenes stacked on diamond surface and acted as building blocks forming a polymerlike structure. The assembled film was also highly porous due to cluster-cluster interaction. The bond angle distribution and the neighbor-atomnumber distribution of the film presented a well-defined local order, which is of sp 3 hybridization character, the same as that of a free C 20 cage. These simulation results are again in good agreement with the experimental observation. Finally, the deposited C 20 film showed high stability even when the temperature was raised up to 1500 K.