“…9 A variety of techniques have been reported for the preparation of F-terminated diamond surfaces with varying degrees of success. These have been based on the exposure of surfaces to fluorine-containing gases (atomic F, 10-12 F 2 , 2,13 HF, 13 and XeF 2 [14][15][16] ), molecules (fluorocarbons 17 and fluorofullerenes 18 ), and plasmas (CF, 6,19 CHF 3 ,5,20 and C 4 F 8 1,20 ). However, many of these techniques are known to damage or etch the surface and provide unsaturated disordered surfaces with an adsorbed fluorocarbon layer.…”