BVD and Mason’s modelling of piezoelectric bulk acoustic resonators for high frequency applications

Chaudhary, Samya; Singh, Jitendra Kumar; Haque, Fozia Z.

doi:10.1016/j.matpr.2022.04.769

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Principle Of the Polymer-fbar1

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2022

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“…In recent years, researchers have proposed many different simulation analysis methods, such as the Mason and Butterworth Van Dyke one-dimensional simulation, and the simulation results are consistent with the experimental results [ 24 , 25 ].Therefore, it has become one of the most popular simulation methods. Nevertheless, the one-dimensional modeling simulation is not enough to pay attention to the stray mode in the simulation of the FBAR resonator.…”

Section: Principle Of the Polymer-fbarmentioning

confidence: 86%

High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector

Dong

Liu

et al. 2022

Sensors

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A film bulk acoustic resonator (FBAR), based on a polymer air cavity, is presented. The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance. With the aluminum nitride as the piezoelectric layer, the resonance frequency of the FBAR can reach 6.360 GHz, based on the finite element method. The product of the corresponding frequency and the quality factor, f × Q is more than 2 × 1013. This design model provides a good solution for the high-frequency filters and high-sensitivity sensor designs.

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Section: Principle Of the Polymer-fbarmentioning

confidence: 86%