Burst-Mode Femtosecond Pulsed Laser Deposition for Control of Thin Film Morphology and Material Ablation

Murakami, Makoto; Liu, Bing; Hu, Zhendong; Liu, Zhenlin; Uehara, Yuzuru; Che, Yong

doi:10.1143/apex.2.042501

Cited by 41 publications

(20 citation statements)

References 19 publications

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“…14 setup have been devised to reduce the amount of particles being transferred, e.g., by an off-axis geometry, 15 shadow masks ͑"eclipse PLD"͒ 16,17 in combination with a magnetic field ͑so-called Aurora PLD͒, 18 velocity filters, 19 a double laser pulse approach 20 or the use of ultrafast lasers, 21 and pulse shaping. 22 Despite the remarkable achievements these techniques reveal different shortcomings such as diminished deposition rates, a nonuniform film growth, their technical complexity, or material dependent applicability. It is therefore highly desirable to optimize the conventional PLD process.…”

Section: Introductionmentioning

confidence: 99%

Laser ablation characteristics of yttria-doped zirconia in the nanosecond and femtosecond regimes

Heiroth

Koch

Lippert

et al. 2010

Journal of Applied Physics

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The laser ablation characteristics of yttria-stabilized zirconia ͑YSZ͒ have been investigated as a function of the target microstructure and dopant level for different nanosecond-͓ArF, KrF, and XeCl excimers; Nd:YAG ͑yttrium aluminum garnet͒ ͑fourth harmonic͔͒ and femtosecond-laser sources ͓Ti:sapphire ͑fundamental and third harmonic͔͒. Particle ejection, which compromises the quality of coatings prepared by pulsed laser deposition ͑PLD͒, was analyzed in detail. Nanosecond-laser pulses cause a severe thermomechanical surface cracking and exfoliation of micron-sized fragments on a microsecond to millisecond time scale in the case of 8 -9.5 mol % Y 2 O 3 -doped, fully stabilized zirconia ͑8YSZ and 9.5YSZ͒ targets. As a consequence of the intrinsic material brittleness, fully stabilized YSZ coatings deposited by PLD contained particles for all tested conditions. Lower doped partially stabilized zirconia ͑3YSZ͒ exhibits a superior fracture toughness attributed to a laser-induced partial transition to the monoclinic phase, detected by Raman spectroscopy, which enables the deposition of particle-free dense thin films by conventional PLD using nanosecond-UV laser radiation at moderate fluences of 1.2-1.5 J / cm 2 . The ablation dynamics of ultrashort laser pulses differ fundamentally from the nanosecond regime as evidenced, e.g., by time-resolved shadowgraphy and light scattering experiments. Femtosecond pulses prevent the exfoliation of micron-sized fragments but result invariably in a pronounced ejection of submicron particles. The resulting PLD coatings are porous and reveal a large surface roughness as they consist of an agglomeration of nanoparticles. Femtosecond-NIR pulses provide a factor of 2.5-10 higher material removal rates compared to nanosecond-and femtosecond-UV pulses. The ablation metrics, i.e., threshold fluence and effective absorptivity, mainly depend on the laser wavelength while the pulse duration, target microstructure, and dopant level are of minor importance. Evidence is presented that incubation effects play a significant role in nanosecond-and femtosecond-laser ablations of YSZ enabling material removal at comparatively low fluences for sub-bandgap photon energies.

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Section: Introductionmentioning

confidence: 99%

Laser ablation characteristics of yttria-doped zirconia in the nanosecond and femtosecond regimes

Heiroth

Koch

Lippert

et al. 2010

Journal of Applied Physics

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“…Output radiation power in the used configuration of fibre master oscillator was entirely limited by the available pump power of 7.4 W at 978 nm. The achieved relatively high average output radiation power and the possibility of its subsequent increase combined with certain advantages of the generated picosecond pulses (clusters of femtosecond sub-pulses) opens up new prospects of application of F8 mode-locked fibre master oscillators in many important fields, some of which have already become conventional, such as efficient nonlinear transformation of radiation [24,25], laser-induced breakdown spectroscopy [14], micromachining [26,27], surface texturing [28], laser ablation and deposition [29], and many others.…”

Section: Resultsmentioning

confidence: 99%

High average power mode-locked figure-eight Yb fibre master oscillator

Fedotov¹,

Ivanenko²,

Kobtsev³

et al. 2014

Opt. Express

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For the first time, we demonstrate the possibility to generate record-high output radiation power exceeding 1 W in an all-fibre figure-eight mode-locked Yb fibre master oscillator based on non-linear amplifying loop mirror. Generated at the repetition rate of 25 MHz clusters of sub-pulses with duration of no more than 200 fs have envelope width of 23 ps or less. Two typical mode-locked laser regimes with substantially different generation spectra are identified and results of their study presented. Numerical modelling of laser generation in the proposed layout agrees well with the measured experimental data.

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“…Multi-pulse ablation of bulk gold sample results in production of nanostructures caused by combinations of nano-, micro-, and macro-structural surface modifications [3]. Femtosecond laser pulses train that was applied for ablation enables a broad and continuous tunability over the material morphologies ranging from nanoparticle aggregates to epitaxial thin films [4]. Laser ablation in liquid produces nanoparticles with variety of shapes from spherical domination to the tetragonal ones [5].…”

Section: Introductionmentioning

confidence: 99%

The role of magnetic component of a strong light field in electrostrictive effect

Поперенко¹

2018

Semicond. Phys. Quantum Electron. Optoelectron.

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Electrostriction forces during laser ablation have been studied both theoretically and experimentally. The components of electroctrostriction force for inhomogeneous electromagnetic field near a substrate were proposed to be taken similarly to those in gases within nonresonant spectral region. Nonzero Lorentz force in standing light wave was found to be responsible for different morphology of the nanostructured surface as compared to etching the transient substrate. Our experiments were performed using the femtosecond laser focused on polished glass and Al-coated glass surfaces. The treated surfaces were studied using atomic force microscopy with the spatial resolution of 30 nm. Nanoscale patterning of the etched surface spots was explained in the frames of theoretical modeling. Possible spatial locations of electrostriction force components in the Gauss profile laser beam have been also discussed.

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Burst-Mode Femtosecond Pulsed Laser Deposition for Control of Thin Film Morphology and Material Ablation

Cited by 41 publications

References 19 publications

Laser ablation characteristics of yttria-doped zirconia in the nanosecond and femtosecond regimes

Laser ablation characteristics of yttria-doped zirconia in the nanosecond and femtosecond regimes

High average power mode-locked figure-eight Yb fibre master oscillator

The role of magnetic component of a strong light field in electrostrictive effect

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