Bulk-micromachined lithium niorate sensor and actuator for harsh environments

Randles, A. B.; Tanaka, Shuji; Pokines, Brett J.; Esashi, Masayoshi

doi:10.1109/sensor.2005.1497338

Cited by 5 publications

(2 citation statements)

References 4 publications

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“…For wet etching, a Au/Cr mask is formed by sputtering and wet etching on the surface towardz direction, because LiNbO 3 is preferentially etched on the -z face. The masked substrate is etched in HF at 80°C, as reported previously (12) . Figure 4 (a) shows a 40 µm deep cavity fabricated by the wet etching process.…”

Section: Reference Pressure Cavitymentioning

confidence: 99%

Design and Fabrication of Passive Wireless SAW Sensor for Pressure Measurement

et al. 2008

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This paper mainly presents the design and fabrication of a TDMA (time division multiple access) passive wireless pressure sensor using 2.45 GHz surface acoustic wave (SAW) delay lines. The SAW pressure sensor consists of two LiNbO 3 substrates. The first layer is a pressure-detective thin substrate, on which an interdigital transducer (IDT) and reflectors are fabricated. The second layer is a support substrate, in which a reference pressure cavity is etched. These two substrates are directly bonded. The pressure measurement was successfully demonstrated in a pressure range of 20~280 kPa with good repeatability. In addition, the influence of a tire on the wireless interrogation of the sensor was investigated. Automobile tires have little negative influence on wireless communication, at least if they do not rotate.

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Section: Reference Pressure Cavitymentioning

confidence: 99%

Design and Fabrication of Passive Wireless SAW Sensor for Pressure Measurement

et al. 2008

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“…By selectively repoling the crystal, it is possible to form deep trenches in LiNbO 3 , as reported by Barry et al 8) The second method uses a Au mask on the ÀZ face, as reported previously. 9) Another fabrication method for LiNbO 3 is thermal inversion. The thermal inversion process creates a layer on the þZ face with a polarity opposite to that of the bulk crystal on the þZ face.…”

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confidence: 99%

Etch Stop Process for Fabrication of Thin Diaphragms in Lithium Niobate

Randles¹,

Esashi²,

Tanaka³

2007

jjap

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In this paper, we present a novel process for the fabrication of thin diaphragms in lithium niobate (LiNbO3) wafers for various sensor applications. The process uses a thermal inversion layer as an etch stop. Thermal inversion is a process which forms a layer with a poling direction opposite to that of the bulk crystal. The thermal inversion layer can be used as an etch stop because the etch rate on the +Z face in hydrofluoric acid is much slower than that on the -Z face. The thickness of the thermal inversion layer determines the thickness of the final diaphragm; diaphragms with thicknesses of 6 and 30 µm have been fabricated in Z-cut and 128°-Y-cut wafers, respectively.

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