It is critical to
reveal how crystalline polarity correlates with
the electronic transport properties in polar semiconductors, such
as zinc oxide (ZnO), for the development of materials with properties
tailored for specific optoelectronic applications. In this paper,
we investigate the structure–property relationships in ZnO
films by means of tailoring the polarity of homostructural ZnO bilayers
that are subjected to an external substrate bias (V
sub) during deposition. Since the probability of incorporating
defects and impurities in ZnO depend on the crystalline facet, the
polarity of ZnO should be a critical parameter in determining electronic
conductivity. The electric conductivity and Hall mobility of the ZnO
films deposited under positive V
sub were
much higher than those deposited under negative V
sub. Further investigations of the homostructural ZnO
bilayer films, where different signs and magnitudes of V
sub were applied, revealed that the polarity is responsible
for electronic conductivity of the ZnO films in this study.