Bulk anodization of Al by using high voltage and polydimethylsiloxane imprinting for transparent conductive films

Abstract

Bulk anodization of Al was successfully carried out at 300 V by controlling the concentrations of phosphoric acid and ethanol used during processing. Optimized anodic aluminum-oxide (AAO) patterns were transferred onto a polydimethylsiloxane (PDMS) film through an imprinting process. The open ratio of the AAO patterns and the PDMS patterns were examined as a function of the pore widening time. The open ratio of the AAO pattern obtained from a 90-min widening process was 85.8%. PDMS patterns were then obtained by imprinting the aforementioned AAO rolls onto the PDMS surface. The open ratios of the PDMS patterns ranged from 79.6 to 82.7%.