Building an Ambient Fluid Analysis around nm Oscillated Laser Trapping Probe(<Special Issue>Norms the of Manufacturing and Machine Tools)

Abstract

In order to rneasure the 3D shape of microcompolle 匣 lts ， a novel nano − CMM systeln has beell developed based on an oscillated probing technique ， which uses an optlcally trapped particle ． The trapPed particle is laterally oscillated at the focal pla τ le of the objective ． The frequency respor ユse Qf the uscillated partide typically agrees with the spring − mass − dampeT modeL HQwever the response disagrees with the theoretical curve of the conven しional model equa し iQn in the range Qf high fre ・ quency ． It is cons 正 dered the di幵erellce between experimellts arld the model equation is caused fr 〔 ⊃m the nulnerical error for the Huid effect ， which is applied rm c 〔 mdition of creeping flow past a sphere ． 1n this report ， we construct a nuid simulation using SMAC method that calcu 】 ates 刊uid resistan ¢ e against an oscil 】 ating sphere in noninertial frame of reference ． The Huidresistance damp the