Buckling beam micromechanical memory with on-chip readout

Roodenburg, D.; Spronck, Jo W.; Zant, Herre S. J. van der; Venstra, Warner J.

doi:10.1063/1.3129195

Cited by 76 publications

(70 citation statements)

References 15 publications

(9 reference statements)

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“…One benchmark of MEMS is the initially straight microbeam system driven by electrostatic force, whose static and dynamic behaviours have been largely investigated in the literature [1][2][3][4]. Recently, the bistable MEMS based on initially curved microbeams have drawn more and more attention from the scientific community for their various potential applications such as optical switches, micro-valves and non-volatile memories [5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Snap-through buckling of initially curved microbeam subject to an electrostatic force

Chen

Meguid

2015

Proc. R. Soc. A.

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In this paper, the snap-through buckling of an initially curved microbeam subject to an electrostatic force, accounting for fringing field effect, is investigated. The general governing equations of the curved microbeam are developed using Euler-Bernoulli beam theory and used to develop a new criterion for the snap-through buckling of that beam. The size effect of the microbeam is accounted for using the modified couple stress theory, and intermolecular effects, such as van der Waals and Casimir forces, are also included in our snap-through formulations. The snap-through governing equations are solved using Galerkin decomposition of the deflection. The results of our work enable us to carefully characterize the snap-through behaviour of the initially curved microbeam. They further reveal the significant effect of the beam size, and to a much lesser extent, the effect of fringing field and intermolecular forces, upon the snap-through criterion for the curved beam.

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Section: Introductionmentioning

confidence: 99%

Snap-through buckling of initially curved microbeam subject to an electrostatic force

Chen

Meguid

2015

Proc. R. Soc. A.

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“…The bistable micro-electro-mechanical systems (MEMS) based on initially curved microbeams have drawn considerable attention from the research community due to their potential applications as optical switches, micro-valves and non-volatile memories [1][2][3][4][5]. The initially curved beam (arch) under transverse forces may exhibit two main instabilities: symmetric snap-through buckling and asymmetric bifurcation.…”

Section: Introductionmentioning

confidence: 99%

Asymmetric bifurcation of thermally and electrically actuated functionally graded material microbeam

Chen¹,

Meguid²

2016

Proc. R. Soc. A.

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In this paper, we investigate the symmetric snapthrough buckling and the asymmetric bifurcation behaviours of an initially curved functionally graded material (FGM) microbeam subject to the electrostatic force and uniform/non-uniform temperature field. The beam model is developed in the framework of Euler-Bernoulli beam theory, accounting for the through-thickness power law variation of the beam material and the physical neutral plane. Based on the Galerkin decomposition method, the beam model is simplified as a 2 d.f. reduced-order model, from which the necessary snap-through and symmetry breaking criteria are derived. The results of our work reveal the significant effects of the power law index on the snap-through and symmetry breaking criteria. Our results also reveal that the non-uniform temperature field can actuate the FGM microbeam and induce the snap-through and asymmetric bifurcation behaviours.

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“…Mechanical bistability has attracted the attention of the scientific community in the last years as the base for the implementation of switches [1,2], memory bits [3], vibration energy harvesters [4] and sensitive measurement systems [5]. In previous works we have introduced and demonstrated the feasibility of inducing bistable behavior in Micro Electro Mechanical Systems (MEMS) through electrostatic interaction [6] and mechanical compression [7,8].…”

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confidence: 99%

Micro-electromechanical memory bit based on magnetic repulsion

López-Suárez

Neri

2016

Applied Physics Letters

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A bistable micro-mechanical system based on magnetic repulsion is presented exploring its applicability as memory unit where the state of the bit is encoded in the rest position of a deflected cantilever. The non-linearity induced on the cantilever can be tuned through the magnetic interaction intensity between the cantilever magnet and the counter magnet in terms of geometrical parameters. A simple model provides a sound prediction of the behavior of the system. Finally we measured the energy required to store a bit of information on the system that, for the considered protocols, is bounded by the energy barrier separating the two stable states. * igor.neri@nipslab.org 1

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Buckling beam micromechanical memory with on-chip readout

Cited by 76 publications

References 15 publications

Snap-through buckling of initially curved microbeam subject to an electrostatic force

Snap-through buckling of initially curved microbeam subject to an electrostatic force

Asymmetric bifurcation of thermally and electrically actuated functionally graded material microbeam

Micro-electromechanical memory bit based on magnetic repulsion

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