Broadband-reflecting optical thin films for the far ultraviolet spectral range

Yang, Minghong; Zhou, Ciming; Jiang, Desheng; Shen, Lie

doi:10.1016/j.tsf.2008.07.025

Cited by 2 publications

(1 citation statement)

References 25 publications

(21 reference statements)

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“…According to this theory, sub-quarterwave multilayers such as SiC/W/Ru/Ir, SiC/W/Ir/Co, Be/W/Ir/Co and SiC/MgF2/Al have been design in 50-110nm range [8][9][10], however, there is no application report of these multilayers on grating fabrication. Sub-quarterwave multilayers have been shown to have wide spectral and angular bandwidths.…”

Section: Introductionmentioning

confidence: 99%

Design of multilayer grating in VUV spectrum by rigorous coupled-wave method

Liu

Chen

et al. 2010

SPIE Proceedings

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The rigorous coupled-wave method (RCWM) is extended to calculate the diffraction efficiency of multilayer grating in spectrum with strong absorption. This paper gives a detailed algorithm analysis of the RCWM, an enhanced, numerically stable transmittance matrix approach applied to homogenous layered media is generalized for multilayer grating structure. In order to calculate in the lossy medium, the wave vector of electric field is redefined. This method is programmed to design multilayer grating which is expected to use on Seya-Namioka synchrotron monochromator in vacuum ultraviolet (VUV) spectrum. The influence on diffraction efficiency caused by grating profile and multilayer stack is analyzed theoretically. The diffraction efficiencies of well-designed multilayer gratings are all greater than 10% in 50-110nm region, and they are about two to three times higher than that of the single metallic layer grating which is being used on Seya-Namioka monochromator now.

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Section: Introductionmentioning

confidence: 99%