Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting

Abstract

Subwavelength scale antireflection moth-eye structures in silicon were fabricated by a wafer-scale nanoimprint technique and demonstrated an average reflection of 1% in the spectral range from 400 to 1000 nm at normal incidence. An excellent antireflection property out to large incident angles is shown with the average reflection below 8% at 60°. Pyramid array gave an almost constant average reflection of about 10% for an incident angle up to 45° and concave-wall column array produced an approximately linear relation between the average reflection and the incident angles. The technique is promising for improving conversion efficiencies of silicon solar cells.

Room temperature large-area nanoimprinting for broadband biomimetic antireflection surfaces

“…12,13 Other technologically important template technique is nanoimprint lithography, which has been shown to be a simple and low cost method with high resolution and throughput in fabricating nano-scale antireflection coatings. 14 We chose HSQ as a resist material because it can be used in room temperature nanoimprinting without any further treatment, producing features with very high resolution linewidth.…”

Biomimetic corrugated silicon nanocone arrays for self-cleaning antireflection coatings

“…A good antireflective coating should show low reflectance over a wide AOI for both forms of light polarization [8,23], which is important for applications in sunrise-to-sunset solar cells [24]. The angledependent reflectivities for a polished Si wafer, planar SiNC array and corrugated SiNC arrays are shown in Fig.…”

Efficiently Harvesting Sun Light for Silicon Solar Cells through Advanced Optical Couplers and A Radial p-n Junction Structure

“…Unique physical properties appear within such small dimensions owing to quantum confinement or high surface energy, which make nanostructured silicon more feasible for photovoltaic devices. One-dimensional nanostructures such as nanotips (NTs), nanorods, and nanowires (NWs) could present great anti-reflection properties [63][64][65][66]. The reflection of such structures can be significantly reduced down to 5% [64,65] or even 1% [63] for a broadband spectrum from UV to near-IR which matches the solar spectrum.…”