2021
DOI: 10.1063/5.0027219
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Broadband femtosecond spectroscopic ellipsometry

Abstract: We present a setup for time-resolved spectroscopic ellipsometry in a pump–probe scheme using femtosecond laser pulses. As a probe, the system deploys supercontinuum white light pulses that are delayed with respect to single-wavelength pump pulses. A polarizer–sample–compensator–analyzer configuration allows ellipsometric measurements by scanning the compensator azimuthal angle. The transient ellipsometric parameters are obtained from a series of reflectance-difference spectra that are measured for various pump… Show more

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Cited by 17 publications
(10 citation statements)
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“…These discrepancies may originate from the treatment of the oxide layer, as discussed in ref. [2]. Interestingly, it seems that some parameters evolve with different rates and reach their final value faster than others (e.g., the E 1 + Δ 1 amplitude measured with λ pump = 400 nm).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…These discrepancies may originate from the treatment of the oxide layer, as discussed in ref. [2]. Interestingly, it seems that some parameters evolve with different rates and reach their final value faster than others (e.g., the E 1 + Δ 1 amplitude measured with λ pump = 400 nm).…”
Section: Resultsmentioning
confidence: 99%
“…[1] (the instrumental setup is also described in ref. [2]); however, a quantitative analysis of the data has not been included. Therefore, the goal of this work is to quantitatively investigate the time‐resolved critical points E 1 and E 1 + Δ 1 in Ge and E 1 in Si using the data provided in ref.…”
Section: Introductionmentioning
confidence: 99%
“…The results of these experiments can be found elsewhere [30,37,38]. trSE measurements were performed using a femtosecond pulsed laser [10], according to Fig. 2.…”
Section: Methodsmentioning
confidence: 99%
“…Furthermore, measurement techniques that are able to accurately investigate those effects are necessary. In recent years, time-resolved pump-probe spectroscopic ellipsometry (trSE) proved to be an excellent contestant for this with many possibilities [8][9][10][11]. Spectroscopic ellipsometry is a predestined method for obtaining optical and material properties of semiconductors as well as many other materials, due to its high accuracy and sensitivity.…”
Section: Introductionmentioning
confidence: 99%
“…The HHG source serves two stations for XUV science: 'MAC' for atomic, molecular and optical science and coherent diffractive imaging (Klimesova ´et al, 2021), and 'ELIps' for XUV materials science applications (Espinoza et al, 2020). Complementary methods for ultrafast optical spectroscopy are also available (using support lasers): transient optical absorption (Naumova et al, 2018), stimulated Raman scattering (Andrikopoulos et al, 2020), time-resolved spectroscopic ellipsometry (Richter et al, 2021) and IR (1D and 2D) spectroscopy.…”
Section: Methodsmentioning
confidence: 99%