2010
DOI: 10.1364/oe.18.014345
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Broad tuning of whispering-gallery modes in silicon microdisks

Abstract: Silicon microdisks with dynamically-tunable resonance spectra are achieved with nanoscale, in-plane silicon electrical contacts in a single lithographic step. Electrical current is passed through the devices to enable thermal tuning via joule heating. A 14nm wavelength shift is demonstrated with 1.6mW power consumption in devices with >20nm free spectral ranges and quality factors exceeding 20,000. Spectral shifts equal to a full width at half maximum can be achieved with approximately 10microW tuning power fo… Show more

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Cited by 18 publications
(19 citation statements)
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“…2, revealing a full width at half maximum (FWHM) linewidth of 0.11 nm, corresponding to a loaded Q factor of Q l = r /FWHM=1.4x10 4 (where  r is the resonant wavelength). In spite of the improved surface quality, the loaded Q factor is of a similar magnitude to that reported in microdisks [16], due to the bulk material loss of a-Si:H and the method of coupling. Several measurements of different microresonators showed similar Q factors.…”
Section: B Optical Properties Of Taper-coupled Whispering Gallery Modessupporting
confidence: 51%
See 1 more Smart Citation
“…2, revealing a full width at half maximum (FWHM) linewidth of 0.11 nm, corresponding to a loaded Q factor of Q l = r /FWHM=1.4x10 4 (where  r is the resonant wavelength). In spite of the improved surface quality, the loaded Q factor is of a similar magnitude to that reported in microdisks [16], due to the bulk material loss of a-Si:H and the method of coupling. Several measurements of different microresonators showed similar Q factors.…”
Section: B Optical Properties Of Taper-coupled Whispering Gallery Modessupporting
confidence: 51%
“…Recent advances in silicon photonics have accelerated interest in the fabrication of high Q silicon WGM microresonators [14][15][16]. Silicon is an excellent material for photonics applications, owing to its high optical damage threshold, large nonlinearities and its broad transmission window (~1.2-7 m).…”
Section: Introductionmentioning
confidence: 99%
“…Figure 9(a) shows a typical transmission spectrum measured for a 6 µm diameter a-Si:H fibre resonator when launching into the WGMs via a standard tapered silica fibre coupler approach [52]. This spectrum reveals Q-factors on the order of 10 4 , which are comparable to the best values reported in planar-based single crystal silicon resonators [54], and these could be improved further by optimizing the material and coupling conditions. Significantly, as these WGM resonators are essentially free-standing, for appropriate choices of the starting fibre core diameter they are capable of operating across the full infrared transmission window of the semiconductor material.…”
Section: Semiconductor Fibre Resonatorsmentioning
confidence: 65%
“…Finite-difference frequency-domain (FDFD) simulations 6 The large thermooptic coefficient of silicon α (α =1.86*10 -4 1/K), due to the temperature dependence of the silicon bandgap 7 , is used to enable thermal modal tuning. This temperature dependence leads to the shift of the central wavelength of this mode as the temperature increases (Fig.…”
Section: Temperature Dependencementioning
confidence: 99%