BrF3 dry release technology for large freestanding parylene microstructures and electrostatic actuators

Yao, Tze-Jung; Yang, Xing; Tai, Yu‐Chong

doi:10.1016/s0924-4247(02)00019-5

Cited by 47 publications

(22 citation statements)

References 8 publications

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“…Referred to the experimental data in Ref. [19], Mastrangelo and Tas's model [6,7] is near to the upper limit, and the uniform load model in this work is near to the lower limit. It means that the mechanical behavior of cantilevers in this work considering the beam instability is softer than Mastrangelo and Tas's model which may take into account static equilibrium only.…”

Section: Stiction Of Parylene Beam-actuatorssupporting

confidence: 61%

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Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures

Yang

Marimuthu

2015

J. mech.

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This note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction.

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Section: Stiction Of Parylene Beam-actuatorssupporting

confidence: 61%

“…[19], some parylene cantilever beams have been fabricated to integrate an electrostatic micro-flap actuator. Their experimental results show that for 4.5m thick parylene structures with 4.5m thick sacrificial layer, no free-standing cantilever beams longer than 100m can be made.…”

Section: Stiction Of Parylene Beam-actuatorsmentioning

confidence: 99%

Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures

Yang

Marimuthu

2015

J. mech.

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“…Parylene has been used for microfluidics channels, [70,71] valves, [72,73] sensors (e.g., acceleration sensors, [74] pressure sensors, [75] microphones, [76] ultrasonic imaging devices, [77] and shear stress sensors [75] ) and large area structures. [78] Notable providers of Parylene material and/or processing equipment include Specialty coating systems (SCS) Corporation, Comelec Corporation, and Uniglobe Kisco Corporation. c) Nanocomposite Elastomer Nancomposites are an exciting new material under intense investigation.…”

Section: Polymer Mems Devicesmentioning

confidence: 99%

Recent Developments in Polymer MEMS

2007

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Polymer materials, including elastomers, plastics and fibers, are being actively used for MEMS sensors and actuators. Polymer materials provide many advantages in terms of cost, mechanical properties, and ease of processing. In addition, polymers are being investigated for displays, memory, and circuitry. However, the incorporation of polymers for structural or functional purposes in MEMS systems raises new issues and challenges. This article provides a comprehensive review of the recent state of the art of polymer based MEMS—including materials, fabrication processes, and representative devices, including microfluidic valves and tactile sensors. Frequently used materials are reviewed, including polydimethylsiloxane (PDMS), parylene, nanocomposite elastomers, and SU‐8 epoxy.

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“…It is another material that has been used as stencil material [150], [151] It has found wide recognition as biocompatible polymer and brings about many interesting possibilities in MEMS [152], mostly in microfluidic and bioMEMS applications [153], and medical industries [154]. Parylene films are transparent, conformal, uniform, low defect density, chemically inert due to low temperature vapor deposition polymerization coating process, and allow multi-layer processing to produce complex structures and features [153].…”

Section: Techniquementioning

confidence: 99%

Incorporating nanomaterials with MEMS devices.

Moiseeva¹

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DEDICATION To my Mom and Dadiii ACKNOWLEDGEMENTS I would like to thank my professor, Dr. Cindy Harnett, for her guidance, endless support and patience. I am grateful to her for being a continuous source of motivation and inspiration. I would also like to thank my lab members: Yehya Senousy, Tom Lucas, Silpa Kona, and Jasmin Beharic who put their efforts in making the lab very exciting place to work. This dissertation demonstrates an elegant method, known as 'micro-origami' or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar lithography.Folding allows creating complex, robust, three-dimensional shapes from two-dimensional material simply by choosing folds in the right order and orientation, small disturbances of the initial shape may also be used to produce different final shapes. These are referred to as "pop-up structures" in this work.The scope of this work presented the deposition of colloidal gold nanoparticles (GNPs) into conformal thin films using a microstenciling technique. Results illustrated that the gold nanoparticle deposition process can easily be integrated into current MEMS microfabrication processes. Thin films of GNPs deposited onto the surfaces of siliconbased bistable MEMS and test devices were shown to have a significant effect on the heating up of microstructures that cause them to fold.The dissertation consists of four chapters, covering details of fabrication methods, theoretical simulations, experimental work, and existing and potential applications.Chapter II illustrates how control of the folding order can generate complex threev dimensional objects from metal-oxide bilayers using this approach. By relying on the fact that narrower structures are released from the substrate first, it is possible to create multiaxis loops and interlinked objects with several sequential release steps, using a single photomask. The structures remain planar until released by dry silicon etching, making it possible to integrate them with other MEMS and microelectronic devices early in the process.Chapter III depicts the fabrication process of different types of bistable structures.It describes the principle of functioning of such structures, and simulations using CoventorWare are used to support the concept. We talk over about advantages and disadvantages of bistable structures, and discuss possible applications.Chapter IV describes fabrication procedure of nanoparticle-MEMS hybrid device.We introduce a convenient synthesis of GNPs with precisely controlled optical absorption in the NIR region by a single step reaction ofHAuCl 4 and Na2S203. We take a look at different techniques to pattern gold nanoparticles on the surface of MEMS structures, and also provide a study of their thermal properties under near IR stimulation.We demonstrate the first approach of laser-driven bistable MEMS actuators for bioapplications.

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BrF3 dry release technology for large freestanding parylene microstructures and electrostatic actuators

Cited by 47 publications

References 8 publications

Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures

Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures

Recent Developments in Polymer MEMS

Incorporating nanomaterials with MEMS devices.

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