2019
DOI: 10.1109/led.2019.2923420
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Boron Vacancies Causing Breakdown in 2D Layered Hexagonal Boron Nitride Dielectrics

Abstract: Dielectric breakdown in 2-D insulating films for future logic device technology is not well understood yet, in contrast to the extensive insight we have in the breakdown of bulk dielectric films such as HfO2 and SiO2. In this study, we investigate the stochastic nature of breakdown (BD) in hexagonal boron nitride (h-BN) films using ramp voltage stress and examine the BD trends as a function of stress polarity, area and temperature. We present evidence that points to a non-Weibull distribution for h-BN BD and u… Show more

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Cited by 19 publications
(21 citation statements)
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“…However, we highlight that a large difference and spread in β is expected if the sample being tested has a wide variation in h-BN thickness. 44 Further, CVD-grown h-BN films are known to have many other sources of variability. 35,45 These include local defect density variations, grain boundaries, and the roughness of the bottom electrode which can skew the V SBD,h-BN distributions.…”
Section: Resultsmentioning
confidence: 99%
“…However, we highlight that a large difference and spread in β is expected if the sample being tested has a wide variation in h-BN thickness. 44 Further, CVD-grown h-BN films are known to have many other sources of variability. 35,45 These include local defect density variations, grain boundaries, and the roughness of the bottom electrode which can skew the V SBD,h-BN distributions.…”
Section: Resultsmentioning
confidence: 99%
“…The currents driven by the memristors increased over time until the dielectric breakdown (DB) of the oxide was triggered (Figure 1b), as expected. [ 36 ] Then, in fresh devices, we applied sequences of RVS in order to introduce certain amount of defects in the insulator (Figure 1c), and after that, we applied again CVS at different biases. The Ni/Al 2 O 3 /Au never exhibited RTN; on the contrary, the Ni/HfO 2 /Au samples exhibited RTN current signals fluctuating between ≈24 and ≈60 µA when a CVS of 4.5 V was applied (Figure 1d), but only after an RVS from 0 to 8 V was applied (Figure 1c).…”
Section: Materials‐based Rtn Analysismentioning
confidence: 99%
“…An RTN current signal is defined as the current signal that exhibits stochastic fluctuations between two or more levels at random and unpredictable times [ 7 ] ; this phenomenon has been observed in multiple solid‐state electronic devices (e.g., point contact diodes, [ 8 ] metal‐oxide‐semiconductor field‐effect transistors [ 9 ] ), and it is related to the random capture and emission of charge carriers at the atomic defects in dielectrics and semiconductors, as well as at their interfaces with metals. [ 10 ] Two‐level RTN signals are produced by one single defect within the entire MIM‐like memristor, [ 11 ] while multilevel RTN signals are formed by more than one. [ 12 ]…”
Section: Introductionmentioning
confidence: 99%
“…A straightforward type of device for this purpose is a metal–insulator–metal (MIM) configuration. To date, several reports have been published to study the electrical transport and BD properties of MIM structures based on 2D h-BN films. Among these studies, many relied on the conductive atomic force microscopy technique to extract electrical properties. While this method is quite effective, the contact area cannot be precisely determined, leading to a limited understanding of electron tunneling through the h-BN barriers. Although some other reports have adopted MIM devices using direct metal or graphene contacts, , most are based on thicker h-BN films of a few layers to a few tens of layers.…”
Section: Introductionmentioning
confidence: 99%