“…There are various methods to fabricate ZnO-based TCO thin films for optoelectronic devices (like solar cells), including magnetron sputtering, − metal organic chemical vapor deposition, ,, pulsed laser deposition, ,− and the sol–gel method. ,, However, these deposition methods require high growth temperatures or postannealing treatment to produce high-quality ZnO-TCO films. In addition, ion bombardment during sputtering can damage the properties of as-grown functional layers in solar cells.…”