Boron doped SiC thin film on Silicon synthesized from polycarbosilane: a new lead free material for applications in piezosensors

Kundu, Krishnendu; Ghosh, Arnab; Pratihar, Shewli; Singh, Shiv Govind; Kayal, Tarun Kumar; Banerjee, Rajat

doi:10.1007/s10854-021-06966-4

Cited by 1 publication

(1 citation statement)

References 28 publications

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“…A pressure sensor has simple structure, basically a mechanically displaceable part in response to an applied pressure. The displacement due to the applied pressure can easily be converted into a proportional electrical quantity (transduction) by sensors based on piezo electric effect, based on variation in resistance as in the case of piezo resistors, based on variation in capacitance of a capacitive sensor, change in resonant frequency of the resonant sensors or pressure being measured by change in optical properties as in the case optical pressure sensors [1][2][3][4]. Due to the number of advantages that pressure sensors have, like miniaturized size, higher sensitivity, tunable material properties, linearity, high resonant frequency, low hysteresis, fast recovery time etc, [5,6] the research in designing and producing smaller and more efficient sensor is considerably done and keep continuing.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity enhanced flexible capacitive pressure sensor microstructure optimization for biomedical applications

Chaudhary,

Singh

2024

Eng. Res. Express

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This paper explores the design and optimization of Flexible Capacitive Pressure Sensors (FCPS) using microfabrication technology for applications in the emerging field of flexible electronics, with a particular focus on measuring bio-signals characterized by lower pressure ranges. Sensitivity, a critical parameter for effective FCPS performance, is investigated through a comprehensive series of simulation analyses employing finite element modeling. The study involves varying geometrical and mechanical parameters that influence FCPS performance, individually adjusting each parameter while keeping others constant. Microstructures such as cuboids, truncated pyramids with an aspect ratio of 0.5, cylinders, pyramids, and cones are modeled on the dielectric material surface. The parameters considered include inter-space, base length, height, and elastic modulus, to enhance FCPS sensitivity and linearity. Among the different shapes modeled, the cone exhibits the highest sensitivity, followed by the pyramid structure. Comparative analysis indicates that the cone and pyramid shapes demonstrate 15- and 10-times higher sensitivity, respectively, compared to the cuboid structure under an applied pressure of 10 Pa. Simulation results suggest that sensitivity can be finely tuned, with higher inter-space and microstructure height, as well as lower base length and Young's modulus of the dielectric material, contributing to increased sensitivity. However, it is noted that these conditions may lead to decreased capacitance in the absence of applied pressure due to air occupation relative to the dielectric material. The findings are further compared with existing literature, and the FCPS response analysis provides valuable insights for the future design of FCPS, particularly in the context of biomedical applications requiring precise low-pressure signal measurements. This research contributes to advancing the understanding of FCPS performance optimization and lays the groundwork for the development of sensors with enhanced sensitivity for bio-medical applications.

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