Boron doped diamond deposited by microwave plasma-assisted CVD at low and high pressures

Ramamurti, R.; Becker, Michael F.; Schuelke, Thomas; Grotjohn, T.A.; Reinhard, D.K.; Swain, Greg M.; Asmussen, J.

doi:10.1016/j.diamond.2007.08.042

Cited by 43 publications

(27 citation statements)

References 10 publications

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“…1(b)); 10 sccm ( Fig. 1(c))), the average size of the grains decreased to $8 mm, and importantly, the majority of grains showed lamellar-shaped twin characteristic, resulting from the renucleation due to B-doping [15,16]. These B-doped samples show mixed [1 1 0] and [1 1 1] texture, and furthermore, the appearance of {1 1 0} facets is enhanced with respect to {1 1 1} facets in the samples doped with increasing B-doping level (at B-flow rate of 10 sccm).…”

Section: Resultsmentioning

confidence: 93%

Investigation on crystalline structure, boron distribution, and residual stresses in freestanding boron-doped CVD diamond films

Zhang

et al. 2010

Journal of Crystal Growth

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Section: Resultsmentioning

confidence: 93%

Investigation on crystalline structure, boron distribution, and residual stresses in freestanding boron-doped CVD diamond films

Zhang

et al. 2010

Journal of Crystal Growth

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“…Boron doping not only affects the surface morphology of the diamond films, but the structure and electrochemical properties as well [37]. Studies have shown that high boron-doping can result in various electronic defects within the film [37][38][39]. In addition, formation of boron clusters due to interstitial incorporation of boron on diamond has also been shown to disrupt diamond growth [37,[40][41].…”

Section: Surface Electrochemical and Optical Propertiesmentioning

confidence: 97%

Polymer‐coated Boron Doped Diamond Optically Transparent Electrodes for Spectroelectrochemical Sensors

et al. 2016

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Spectroelectrochemical sensors combine electrochemistry, spectroscopy, and partitioning into a film to provide improved selectivity for the target analyte. The sensor usually consists of an optically transparent electrode (OTE) coated with a charge selective polymer film. The polymer film is chosen to pre-concentrate analyte at the OTE surface to improve the sensitivity and provide selectivity against like charged interferences. OTEs such as Indium Tin Oxide (ITO) have been used extensively for spectroelectrochemical sensors, but little is known about the applicability of such sensors using other OTE materials, such as Boron Doped Diamond (BDD). One distinct advantage of BDD OTEs over ITO OTEs is their significant increase in sensitivity for organic compounds, such as 4-aminophenol and hydroquinone. We have developed absorption and fluorescence-based sensing methods with a BDD OTE coated with a sulfonated ionomer film, Nafion

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“…Consequently, the overall effective Young’s modulus can be significantly reduced to minimize the mechanical mismatches between rigid metal and soft tissues. Unfortunately, unlike noble metal, BDD cannot be deposited directly on a polymer substrate due to its high synthesis temperature (500 – 900 °C[37]) exceeding the glass transition temperatures of polymers. To address this issue, a wafer transfer process is required to transfer BDD patterns from rigid BDD growth substrates, such as silicon, onto flexible polymer substrates.…”

Section: Introductionmentioning

confidence: 99%

Large-scale, all polycrystalline diamond structures transferred onto flexible Parylene-C films for neurotransmitter sensing

et al. 2017

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Boron-doped diamond (BDD) has superior electrochemical properties for bioelectronic systems. However, due to its high synthesis temperature, traditional microfabrication methods have limits to integrating BDD with emerging classes of flexible, polymer-based bioelectronic systems. This paper introduces a novel fabrication solution to this challenge, which features (i) a wafer-scale substrate transfer process with all diamond structures transferred onto a flexible Parylene-C substrate and (ii) Parylene anchors introduced to strengthen the bonding between BDD and Parylene substrates, as demonstrated by peeling test. The electrochemical properties of the transferred BDD-polymer electrodes are evaluated using (i) an outer sphere redox couple Ru(NH3)62+/3+ to study the electron transfer process and (ii) quantitative and qualitative studies of a neurotransmitter redox dopamine/dopamine-o-quinone. A linear response of the BDD sensor to dopamine concentrations of 0.5 μM to 100 μM is observed (R2 = 0.999) with a sensitivity of 0.21 μA/cm2·μM. Examples of fabricated diamond-polymer devices suggest a broad application in advanced bioelectronics and optoelectronics.

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Boron doped diamond deposited by microwave plasma-assisted CVD at low and high pressures

Cited by 43 publications

References 10 publications

Investigation on crystalline structure, boron distribution, and residual stresses in freestanding boron-doped CVD diamond films

Investigation on crystalline structure, boron distribution, and residual stresses in freestanding boron-doped CVD diamond films

Polymer‐coated Boron Doped Diamond Optically Transparent Electrodes for Spectroelectrochemical Sensors

Large-scale, all polycrystalline diamond structures transferred onto flexible Parylene-C films for neurotransmitter sensing

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