Optica Advanced Photonics Congress 2022 2022
DOI: 10.1364/bgppm.2022.jtu2a.14
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Boost in THz mobility in UMG silicon treated by phosphorous diffusion gettering

Abstract: By means of Terahertz Spectroscopy we demonstrate a boost in charge carrier mobility in upgraded-metallurgical grade silicon wafers treated by phosphorous diffusion gettering. Mobilities parallel those of high quality poly-Si.

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