2003
DOI: 10.1103/physrevb.68.045204
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Bond-center hydrogen in diluteSi1xGexalloys: Laplace deep-level transient spectroscopy

Abstract: We apply Laplace deep-level transient spectroscopy in situ after low-temperature proton implantation into dilute Si 1Ϫx Ge x alloys and identify the deep donor state of hydrogen occupying a strained Si-Si bond-center site next to Ge. The activation energy of the electron emission from the donor is ϳ158 meV when extrapolated to zero electrical field. We construct a configuration diagram of the Ge-strained site from formation and annealing data and deduce that alloying with ϳ1% Ge does not significantly influenc… Show more

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Cited by 17 publications
(11 citation statements)
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References 19 publications
(20 reference statements)
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“…Studies of impurity behaviour in the bulk alloy, particularly those which span the composition range, are quite limited, however. With regard to hydrogen, infrared absorption [6] and DLTS [7] studies have focused on observations of bond-centred hydrogen properties in dilute alloys at either end of the composition range; theoretical studies have enabled local vibrational modes of this species to be modelled for similar compositions [8]. In these cases, modified properties of the bond-centred species have been observed owing to altered local bonding environments due to the presence of near-by impurity atoms.…”
Section: Introductionmentioning
confidence: 97%
“…Studies of impurity behaviour in the bulk alloy, particularly those which span the composition range, are quite limited, however. With regard to hydrogen, infrared absorption [6] and DLTS [7] studies have focused on observations of bond-centred hydrogen properties in dilute alloys at either end of the composition range; theoretical studies have enabled local vibrational modes of this species to be modelled for similar compositions [8]. In these cases, modified properties of the bond-centred species have been observed owing to altered local bonding environments due to the presence of near-by impurity atoms.…”
Section: Introductionmentioning
confidence: 97%
“…In addition, alloying induced local atomic disorder and band gap shrinkage, two major properties of the alloy, lead to serious deviations from what is known in pure silicon. We may cite the role played by local atomic arrangements upon elastic properties of the vacancy, 3 hydrogen atoms in the bond center position, 4 the A-center, 5 and some transition metals and their complexes. [6][7][8][9] Due to its high diffusivity, iron may easily be introduced into silicon-based materials during heat treatment.…”
Section: Introductionmentioning
confidence: 99%
“…[5][6][7][8] Both configurations are well understood in silicon and germanium based on investigations using various experimental techniques such as Fourier-transform infrared-absorption spectroscopy, 9,10 electron-paramagnetic resonance, 11 deep-level transient spectroscopy ͑DLTS͒, and high-resolution Laplace DLTS. [5][6][7][8] In these materials the H impurity is found to exist in three different charge states H + , H 0 , and H − depending on which site in the crystal lattice it occupies. These charge states give rise to either a donor level ͑0 / +͒ ascribed to hydrogen at the BC site or an acceptor level ͑− / 0͒ ascribed to the T interstitial site.…”
Section: Introductionmentioning
confidence: 99%