BN and SiBN Fiber Coatings Via Cvd Using a Single Source, Liquid Precursor Based on Borazine

Hurwitz, Frances I.; Wheeler, Donald R.; McCue, Terry R.; Chen, Y. L.; Chayka, Paul V.; Xu, Chen

doi:10.1002/9780470294635.ch33

Cited by 10 publications

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“…Several methods have been used to minimize oxidation . These include (1) making the proportional limit (matrix cracking) stress as high as possible, (2) use of a multilayer coatings with many thin 10–100 nm alternating layers of C and matrix, (3) doping BN with Si to enhance BN oxidation resistance, and (4) overcoating BN with protective layers . All these approaches have limitations on the extent to which they improve CMC oxidation resistance.…”

Section: Introductionmentioning

confidence: 99%

Processing and Testing of RE₂Si₂O₇ Fiber–Matrix Interphases for SiC–SiC Composites

et al. 2015

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Rare-earth disilicates (RE 2 Si 2 O 7 ) are investigated for use as oxidation-resistant alternatives to carbon or BN fiber-matrix interphases in ceramic matrix composites (CMC). Dense a, b, c-Y 2 Si 2 O 7 , and c-Ho 2 Si 2 O 7 pellets were formed at 64 MPa and 1050°C-1200°C for 1 h using the field-assisted sintering technique (FAST). Pellet modulus was measured using nanoindentation, and Vickers hardness was measured at loads of 100, 500, and 1000 g. The sliding stress of SCS-0 SiC fibers incorporated in a-, b-, and c-RE 2 Si 2 O 7 matrices were measured by fiber push-out. Deformation of RE 2 Si 2 O 7 after indentation and after fiber push-out was characterized by TEM. Implications of the results for use of RE 2 Si 2 O 7 as a fiber-matrix interphase in CMCs are discussed.

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Section: Introductionmentioning

confidence: 99%

Processing and Testing of RE₂Si₂O₇ Fiber–Matrix Interphases for SiC–SiC Composites

et al. 2015

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“…[2] Moreover, owing to its excellent resistance to the inter-diffusion of oxygen, as well as high thermal and chemical stability, [3] IrO 2 films serve as electrodes for high-density dynamic random access memory (DRAM), or nonvolatile ferroelectric random access memory (NVFRAM), devices. [4] Related investigations have indicated that polarization fatigue of PZT ferroelectric capacitors can be effectively suppressed by using IrO 2 thin film electrodes. [5] In recent reports, IrO 2 was also used to fabricate field-emission cathodes for microelectronic devices and field-emission displays.…”

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Growth of IrO₂ Films and Nanorods by Means of CVD: An Example of Compositional and Morphological Control of Nanostructures

Chen

Huang³

et al. 2003

Chemical Vapor Deposition

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was evaluated over a circular area measuring roughly 500 lm in diameter [13]. After deposition, each of the samples was inspected using an optical stereomicroscope and a scanning electron microscope (SEM) equipped with an energy-dispersive spectrometer. Growth of IrO 2 Films and Nanorods by Means of CVD: An Example of Compositional and Morphological Control of Nanostructures**By Reui-San Chen, Yi-Sin Chen, Ying-Sheng Huang,* Yao-Lun Chen, Yun Chi, Chao-Shiuan Liu, Kwong-Kau Tiong, and Arthur J. Carty Iridium dioxide, IrO 2 , belongs to the family of transition metal oxides that exhibit metallic conductivity at room temperature. It has been used in applications such as optical switching layers in electrochromic devices, [1] and durable electrode materials for chlorine or oxygen evolution.[2]Moreover, owing to its excellent resistance to the inter-diffusion of oxygen, as well as high thermal and chemical stability, [3] IrO 2 films serve as electrodes for high-density dynamic random access memory (DRAM), or nonvolatile ferroelectric random access memory (NVFRAM), devices.[4] Related investigations have indicated that polarization fatigue of PZT ferroelectric capacitors can be effectively suppressed by using IrO 2 thin film electrodes. [5] In recent reports, IrO 2 was also used to fabricate field-emission cathodes for microelectronic devices and field-emission displays.[6]As a result of these diverse applications, there is a growing need to develop easy and reliable methods for growing IrO 2 phases, either as thin films, or in other physical forms. Various methods such as reactive magnetron sputtering, [7] pulsed laser deposition, [8] and annealing of Ir films in an O 2 atmosphere, [9] have been employed for this purpose. However, CVD, a technique that possesses several advantages including better composition control, high deposition rate, excellent step coverage, and suitability for scale-up, [10] has not yet been successfully employed for IrO 2 even though Ir thin films are normally obtained using O 2 as the carrier gas to prevent carbon iridium metal impurities from being incorporated into the deposited film. [11] Recently, the influence of O 2 partial pressure on the formation of IrO 2 using (MeCp)Ir(COD)/O 2 as the reactive gas mixture, has been discussed by Maury and Senocq. [12] In this communication, we wish to report the successful deposition of IrO 2 thin films using the cold-wall CVD method. Moreover, by optimizing experimental parameters, the formation of distinct, rod-like, aligned IrO 2 nanocrystals can be observed, with good control of growth perpendicular to the substrate surfaces. The structural composition, surface morphology, and spectroscopic properties of the resulting IrO 2 materials are discussed.The reactive mixture (CpMe)Ir(COD)/O 2 was used in CVD experiments that were conducted under three different pressure settings, 1 torr, 10 torr, and 30 torr, while deposition temperatures were separated into six settings ranging from 250 C to 500 C. The combined X-ray diffraction (XRD) pattern...

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Progress on Bn and Doped-Bn Coatings on Woven Fabrics

Hurwitz

Scott

Chayka

25th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: A: Ceramic Engineering and Science Proceedi

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A novel, multistep process for applying interface coatings to woven structures using a pulsed CVD process is being evaluated. Borazine (B3N3H6), a neat liquid, and several Si precursors are used in the process to produce BN and SiBN coatings on Hi-Nicalon fabrics and preforms. A three variable, two level, full factorial matrix is proposed to define the influence of processing parameters. Coating morphology, uniformity and chemistry are characterized by field emission scanning electron microscopy (FESEM), energy dispersive (EDS) and Auger spectroscopies.

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BN and SiBN Fiber Coatings Via Cvd Using a Single Source, Liquid Precursor Based on Borazine

Cited by 10 publications

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Processing and Testing of RE₂Si₂O₇ Fiber–Matrix Interphases for SiC–SiC Composites

Processing and Testing of RE₂Si₂O₇ Fiber–Matrix Interphases for SiC–SiC Composites

Growth of IrO₂ Films and Nanorods by Means of CVD: An Example of Compositional and Morphological Control of Nanostructures

Progress on Bn and Doped-Bn Coatings on Woven Fabrics

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BN and SiBN Fiber Coatings Via Cvd Using a Single Source, Liquid Precursor Based on Borazine

Cited by 10 publications

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Processing and Testing of RE2Si2O7 Fiber–Matrix Interphases for SiC–SiC Composites

Processing and Testing of RE2Si2O7 Fiber–Matrix Interphases for SiC–SiC Composites

Growth of IrO2 Films and Nanorods by Means of CVD: An Example of Compositional and Morphological Control of Nanostructures

Progress on Bn and Doped-Bn Coatings on Woven Fabrics

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Processing and Testing of RE₂Si₂O₇ Fiber–Matrix Interphases for SiC–SiC Composites

Processing and Testing of RE₂Si₂O₇ Fiber–Matrix Interphases for SiC–SiC Composites

Growth of IrO₂ Films and Nanorods by Means of CVD: An Example of Compositional and Morphological Control of Nanostructures