Block Gauge Interferometer for Routine Measurement

Sakurai, Yoshimasa; Seino, Shoichi

doi:10.2493/jjspe1933.31.714

Cited by 3 publications

(5 citation statements)

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“…(1) The contact surface of the wrung gauge block differs from mean plane of asperity. Using wringing thickness f, the length M of the gauge block wrung onto a platen measured using a Kösters' interferometer is given by MG-q5+qp+f, (2) where G and çbp are the shift of the reflection plane of the gauge block and that of platen respectively. The value f is usually a positive number.…”

Section: Phase Correctionmentioning

confidence: 99%

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<title>Phase correction in measurement of gauge blocks using a new double-ended interferometer</title>

Ishii¹

1998

SPIE Proceedings

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Phase correction in measured lengths of gauge blocks was researched. It has been known that the phase correction depends on the surface roughness of the gauge and the shift of the effective plane of reflection caused by penetration, due to the complex refractive index.We compared measured lengths of gauge blocks between two methods, a new double-ended interferometer and a conventional Kösters' interferometer. The distance between two effective planes of reflection of the gauge block is measured directly using this double-ended interferometer. While the phase correction for the length of the gauge block using Kösters' interferometer depends only the surface roughness of the gauge block and the platen, if the gauge block and the platen is made of the same material. Thus the part of the phase correction that depends on the surface roughness is separated from that depends on refractive index. The surface roughness of the gauge blocks and the platens were measured using an instrument by stylus method and an atomic force microscope. As the results of the experiments, the consistency of the well-known model for phase correction was confirmed, in which the mechanical plane is determined by the tops of peaks in the profile of the gauge surface.

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Section: Phase Correctionmentioning

confidence: 99%

“…The dispersion of (M -) is given by, 2 _ 14 a_-mM-i , ( g p where (15) cY:?_ includes the uncertainty due to the measurements of Q9 and Mg,p and the dispersion of the surface finish of the gauge blocks and the platens.…”

mentioning

confidence: 99%

<title>Phase correction in measurement of gauge blocks using a new double-ended interferometer</title>

Ishii¹

1998

SPIE Proceedings

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“…The value , which is measured from the back surface, is (5) where is the refractive index of the oil film between the base plate and the gauge block (generally in this case), and is a coefficient determined by the fact that the gauge block is covered with oil: is calculated to be about from arctan [ ], where is the complex refractive index of the gauge block [5]. Obtaining from ( 5) and subtracting it from (1) gives the following: (6) As a result, the geometrical length of the gauge block, , is given by (7) In (7), the phase change is a known physical constant which does not depend on the experimental conditions [2].…”

Section: Measuring Proceduresmentioning

confidence: 99%

“…The experiment was conducted using an NRLM-Tsugami-type interferometer [6,7] for conventional calibration of the gauge blocks. The light source was a Hg lamp.…”

Section: Interferometermentioning

confidence: 99%

Simple compensation method for wringing errors in the interferometric calibration of gauge blocks

Matsumoto¹,

Zeng²

1996

Metrologia

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The paper presents a simple method for compensating the phase change of light reflected at a gauge block. This is done by measuring the gauge block from the rear of a glass base plate with which it was placed in optical contact for the interferometric calibration. The length of the gauge block can be determined accurately since the method compensates for errors such as those due to bending of the base plate and variations in oil film thickness in wringing the gauge block to the base plate.

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“…Lengths of reference-grade gauge blocks are usually measured with a Kösters interferometer [1,2]. Since the distance between the upper face of a gauge block and the platen, which is the definition of International Standard 3650 (Gauge blocks), is measured using this interferometer, it is necessary to wring the gauge block onto the platen.…”

Section: Introductionmentioning

confidence: 99%

New method for interferometric measurement of gauge blocks without wringing onto a platen

Ishii¹,

Seino²

1998

Metrologia

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A new method, using a novel double-ended interferometer, is described for the highly efficient calibration of gauge blocks. Unlike the conventional Kösters interferometric method, the new method does not require wringing of the gauge block onto an auxiliary platen. Although the gauge block length defined by International Standard 3650 (Gauge blocks) can be obtained using the Kösters method, the wringing operation is a laborious process, which requires skill, sometimes causes contact errors and decreases measuring efficiency, and prevents a fully automated measuring operation. The new interferometer can also be used as a conventional Kösters interferometer by changing some of the optical systems. Thus, after preliminary investigations measuring some samples using the Kösters method, we can determine an accurate correction value, dependent on the phase shift of light at the reflecting surface, to obtain the gauge block length defined by ISO 3650. The results, obtained from experimental work and theoretical analysis, show that the combined standard uncertainty of a gauge block length up to 100 mm is less than 16 nm, and this value is nearly the same as that obtained by the conventional Kösters method.

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Block Gauge Interferometer for Routine Measurement

Cited by 3 publications

References 0 publications

<title>Phase correction in measurement of gauge blocks using a new double-ended interferometer</title>

<title>Phase correction in measurement of gauge blocks using a new double-ended interferometer</title>

Simple compensation method for wringing errors in the interferometric calibration of gauge blocks

New method for interferometric measurement of gauge blocks without wringing onto a platen

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