Block Copolymer Nanostructured Thin Films for Advanced Patterning

Chavis, Michelle A.; Schwartz, Eric M.; Ober, Christopher K.

doi:10.1002/9780470825150.ch25

Cited by 3 publications

(5 citation statements)

References 108 publications

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“…Advances in novel manufacturing techniques on a nanoscale have relentlessly revolutionized the miniaturization of electronic circuitry and devices that impact countless aspects of modern life. Conventional top‐down lithographies suffer from inherent limitations for quick and reliable patterning beyond around 22 nm half pitch . The most recently released International Technology Roadmap for Semiconductors (ITRS) lithography outlined a technological pathway for the semiconductor industry .…”

Section: Metallopolymers In Nanofabrication and Nanomanufacturingmentioning

confidence: 99%

“…The roadmap's technical pace typically shows companies meeting Moore's law. The current industrial grand challenge as identified by the ITRS is to achieve 16 nm half pitch, where block copolymer lithography and directed self‐assembly (DSA) are emerging from the research stage, demonstrating potential for very‐high‐resolution, large‐throughput patterning . Block copolymers tend to self‐assemble into a variety of ordered nanoscale morphologies, driven by the attractive (repulsive) interaction of like (dissimilar) blocks.…”

Section: Metallopolymers In Nanofabrication and Nanomanufacturingmentioning

confidence: 99%

“…In block copolymer lithography the self‐assembled nanodomains are used as etch masks for pattern transfer applications . Poly(styrene‐ block ‐methyl methacrylate) (PS‐ b ‐PMMA) has been studied extensively for lithography . Replacing PMMA with a metallopolymer block such as a polymetallocene exhibits several advantages over the non‐metallic PMMA block .…”

Section: Metallopolymers In Nanofabrication and Nanomanufacturingmentioning

confidence: 99%

“…. Ross, Manners, Winnik, Hawker, Thomas, Russell, Vancso, Nealey and others have extensively used PFS BCPs as a nanolithographic template to pattern a range of technologically relevant surfaces …”

Section: Metallopolymers In Nanofabrication and Nanomanufacturingmentioning

confidence: 99%

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Nanofabrication with metallopolymers ‐ recent developments and future perspectives

Ramanathan

Darling

2013

Polymer International

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Synthetic polymers containing metals and metal centers have experienced rapid growth in the last two decades. Metal‐containing polymers have an unprecedented role to play in modern high‐tech applications including nanomanufacturing, sensing, separation and catalysis. Advancement in synthetic strategies for macromolecules has enabled the synthesis of novel, exotic and use‐inspired metallopolymers. Using state‐of‐the‐art design strategies, it is now possible to perform targeted synthesis of macromolecules with varied complexity that contain a range of metal centers either in the backbone or in the side chains of the organic moiety. The presence of an inorganic element (metals and metal centers) in organic moieties has led to a number of new physicochemical properties while implementing novel functionality to the polymer matrix. This review covers nanotechnology influenced by distinctive features of metal‐containing macromolecular systems, particularly in developing flexible, functional materials. © 2013 Society of Chemical Industry

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Section: Metallopolymers In Nanofabrication and Nanomanufacturingmentioning

confidence: 99%

Section: Metallopolymers In Nanofabrication and Nanomanufacturingmentioning

confidence: 99%

Section: Metallopolymers In Nanofabrication and Nanomanufacturingmentioning

confidence: 99%

Section: Metallopolymers In Nanofabrication and Nanomanufacturingmentioning

confidence: 99%

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Nanofabrication with metallopolymers ‐ recent developments and future perspectives

Ramanathan

Darling

2013

Polymer International

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“…Besides these metal-containing BCPs there are several other BCP microdomains confined within the surface topography in order to guide their selfassembly. 64,65 The specific interest in this particular class of metal-containing BCPs stems from its robustness against oxygen plasma, which is highly desirable for pattern transfer using these templated selfassembled patterns in BCP nanolithography. 66 Because the organometallic segment of PS-b-PFS copolymers contains Fe and Si, exposure to oxygen plasma results in a robust oxide barrier that imparts high etch selectivity between the blocks.…”

Section: Confined Assembly Of Block Copolymers (Bcps)mentioning

confidence: 99%

Materials self-assembly and fabrication in confined spaces

Ramanathan

Kilbey

et al. 2012

J. Mater. Chem.

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Tailored Synthesis of Triblock Co- and Terpolymers Composed of Synthetically Difficult Sequence Orders by Combining Living Anionic Polymerization with Specially Designed Linking Reaction

Matsuo

Konno

Goseki

et al. 2016

Macromol. Chem. Phys.

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This study demonstrates the versatility and wider applicability of the recently developed methodology combining the living anionic polymerization with a specially designed linking reaction using the α-phenylacrylate (or benzyl bromide) function, allowing the synthesis of triblock co-and terpolymers, which are otherwise diffi cut to be obtained by sequential addition of monomers during a sequential polymerization approach. With this methodology using styrene and four para -substituted styrene derivatives with N -cyclohexylimine, 4-N,N -dimethyl-2-oxazoline, 2,6-di( tert -butyl)-4-methylphenyl ester, and nitrile, 12 polymers among the 16 possible triblock terpolymers and 6 triblock copolymers were successfully synthesized. Furthermore, the synthesis of two tetrablock quarterpolymers was achieved by the same linking methodology. The polymers synthesized in this study are all well-controlled in chain length, composition, which are diffi cult to be obtained by the sequential polymerization. In addition, they possess functional groups usable for the further modifi cation and introduction of other functionalities.

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Block Copolymer Nanostructured Thin Films for Advanced Patterning

Cited by 3 publications

References 108 publications

Nanofabrication with metallopolymers ‐ recent developments and future perspectives

Nanofabrication with metallopolymers ‐ recent developments and future perspectives

Materials self-assembly and fabrication in confined spaces

Tailored Synthesis of Triblock Co- and Terpolymers Composed of Synthetically Difficult Sequence Orders by Combining Living Anionic Polymerization with Specially Designed Linking Reaction

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