We obtained preferentially ͑220͒-oriented yttria-stabilized zirconia ͑YSZ͒ buffer layers on glass substrates by pulsed laser deposition. These preferentially ͑220͒-oriented YSZ buffer layers enabled us to grow preferentially ͑100͒-oriented SrRuO 3 bottom electrodes. On the preferentially ͑100͒-oriented SrRuO 3 bottom electrodes, we obtained preferentially c-oriented PbZr 0.48 Ti 0.52 O 3 ͑PZT͒ thin films, which were confirmed by an X-ray diffraction experiment. The highly c-oriented PZT thin films exhibited a high ferroelectric polarization of about 32 m/cm 2 . We also checked a high storage density of about 10 Tbit/in 2 with a minimum bit size below 8 nm with the highly c-oriented PZT thin films by electric force microscope.Generally, a hard disk drive ͑HDD͒ uses ferromagnetic domains as memory bits, which is confirmed by magnetoresistance and giant magnetoresistance ͑GMR͒ devices. 1-3 Especially, the GMR technique makes it possible to read small ferromagnetic domains below tens of nanometer. 1,2 Thus, to increase the HDD storage density, it is required to write a small ferromagnetic domain as a memory unit rather than to develop reading techniques. Hereupon, another obstacle is superparamagnetism, which results from losing ferromagnetism when small ferromagnetic domains decrease below 10 nm. 4,5 In other words, it is difficult to write small ferromagnetic domains below 10 nm as a memory unit. There have been wide studies on overcoming the superparamagnetic limit of ferromagnetic storage media. 6,7 Meanwhile, we can obtain a ferroelectric domain size below 5 nm as a minimum nucleus, which gives the opportunity for the substitution of ferromagnetic media. 8 Many researchers have demonstrated ferroelectric storage media based on scanning probe microscopy ͑SPM͒ techniques such as electric force microscopy ͑EFM͒, Kelvin probe force microscopy ͑KFM͒, and piezoelectric force microscopy ͑PFM͒. 9-13 In the early stage of these SPM studies on switching ferroelectric domains, there have been studies on basic characteristics such as observations of ferroelectric domains, maximum resolutions of KFM, EFM, and PFM, and feasibility of ferroelectric storage media. 9-13 For the practical application of ferroelectric storage media, it is necessary to fabricate ferroelectric thin films on glass substrates similar to HDD. 14 For the preparation of a good ferroelectric thin film, we need highly crystallized bottom electrodes such as well-ordered Pt bottom electrodes. In this study, we fabricated preferentially ͑100͒-oriented SrRuO 3 ͑SRO͒ bottom electrodes with preferentially ͑220͒-oriented yttria-stabilized zirconia ͑YSZ͒ buffer layers on glass substrates by pulsed laser deposition ͑PLD͒. 15,16 Preferentially c-oriented PbZr 0.48 Ti 0.52 O 3 ͑PZT, with a composition close to the morphotropic phase boundary͒ thin films were grown on the preferentially ͑100͒-oriented SRO bottom electrode, which showed a high ferroelectric polarization of about 32 C/cm 2 . High storage density with a minimum bit size below 8 nm was achieved by the pre...