Bistable out-of-plane stress-mismatched thermally actuated bilayer devices with large deflection

Goessling, B A; Lucas, Thomas M.; Moiseeva, Evgeniya; Aebersold, Julia; Harnett, C. K.

doi:10.1088/0960-1317/21/6/065030

Cited by 11 publications

(9 citation statements)

References 20 publications

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“…For these applications, small mechanical actuators are wanted to respond to energy inputs. Switching between two discrete stable states could be achieved by application of an external stimulus, such as heat [86], vibration [87], pressure [88], electrostatic or magnetic fields [89].…”

Section: Definition Of Bistability and Bistable Mechanismmentioning

confidence: 99%

Incorporating nanomaterials with MEMS devices.

Moiseeva¹

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DEDICATION To my Mom and Dadiii ACKNOWLEDGEMENTS I would like to thank my professor, Dr. Cindy Harnett, for her guidance, endless support and patience. I am grateful to her for being a continuous source of motivation and inspiration. I would also like to thank my lab members: Yehya Senousy, Tom Lucas, Silpa Kona, and Jasmin Beharic who put their efforts in making the lab very exciting place to work. This dissertation demonstrates an elegant method, known as 'micro-origami' or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar lithography.Folding allows creating complex, robust, three-dimensional shapes from two-dimensional material simply by choosing folds in the right order and orientation, small disturbances of the initial shape may also be used to produce different final shapes. These are referred to as "pop-up structures" in this work.The scope of this work presented the deposition of colloidal gold nanoparticles (GNPs) into conformal thin films using a microstenciling technique. Results illustrated that the gold nanoparticle deposition process can easily be integrated into current MEMS microfabrication processes. Thin films of GNPs deposited onto the surfaces of siliconbased bistable MEMS and test devices were shown to have a significant effect on the heating up of microstructures that cause them to fold.The dissertation consists of four chapters, covering details of fabrication methods, theoretical simulations, experimental work, and existing and potential applications.Chapter II illustrates how control of the folding order can generate complex threev dimensional objects from metal-oxide bilayers using this approach. By relying on the fact that narrower structures are released from the substrate first, it is possible to create multiaxis loops and interlinked objects with several sequential release steps, using a single photomask. The structures remain planar until released by dry silicon etching, making it possible to integrate them with other MEMS and microelectronic devices early in the process.Chapter III depicts the fabrication process of different types of bistable structures.It describes the principle of functioning of such structures, and simulations using CoventorWare are used to support the concept. We talk over about advantages and disadvantages of bistable structures, and discuss possible applications.Chapter IV describes fabrication procedure of nanoparticle-MEMS hybrid device.We introduce a convenient synthesis of GNPs with precisely controlled optical absorption in the NIR region by a single step reaction ofHAuCl 4 and Na2S203. We take a look at different techniques to pattern gold nanoparticles on the surface of MEMS structures, and also provide a study of their thermal properties under near IR stimulation.We demonstrate the first approach of laser-driven bistable MEMS actuators for bioapplications.

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Section: Definition Of Bistability and Bistable Mechanismmentioning

confidence: 99%

Incorporating nanomaterials with MEMS devices.

Moiseeva¹

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“…There are many examples where the fields of work overlap, such as in the fabrication techniques of Coulter counters [27,35], or can merge to form a new methodology. For example, a material bilayers that are more traditionally used for thermal actuation [36,37] have been appropriated as a structural material for a novel electroosmotic pumping system [38]. Aspects of microfluidics are influential within this thesis, and MEMS-fluid interaction is discussed further in Chapter 1.…”

Section: Microfluidic Sensingmentioning

confidence: 99%

“…A stress mismatch between the two materials causes the structure to deform out of the plane with a well-defined radius of curvature [36]. The material strain is created during fabrication and is heavily temperature dependent because it is based primarily on the difference between the thermal expansion coefficients of the bilayer.…”

Section: Windowpane Theory Of Bistabilitymentioning

confidence: 99%

“…The hybrid optothermal test structures are created by combining the resistor with the GNPs. Platinum is used as the surface layer because of its biocompatibility and functionality in high-displacement MEMS actuators [36].…”

Section: Particle and Substrate Fabricationmentioning

confidence: 99%

“…Strain between layers of SiO2 and platinum is responsible for the out-of-plane feature and rapid temperature response [36]. Wavelength tuned GNPs are integrated into a polymer film and applied during the fabrication.…”

Section: Fabricationmentioning

confidence: 99%

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Development of a light-powered microstructure : enhancing thermal actuation with near-infrared absorbent gold nanoparticles.

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Rapid Bending Origami in Micro/Nanoscale toward a Versatile 3D Metasurface

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Devices consisting of 3D components are always desired for their far more controllable degrees of freedom compared with their planar counterparts; however, the limitations on the fabrication of 3D nanostructures have severely restricted their applications. Here, a focused ion beam (FIB) defined rapid bending origami method is reported to fabricate 3D micro/nanoscale architectures, by relying on ion irradiation induced 2D structure bending mechanism based on the residual stress formation in metal/dielectric film. Regulated by ions irradiation dose and energy, a large‐scale programmable 2D patterns can be controllably bended to configure versatile 3D micro/nanostructures with scalable bending capacity and feature sizes down to 175 nm. The benefit of this method is, a 3D bended metasurface is designed and fabricated as an asymmetric mirror, showing a very simple strategy to realize high‐efficiency unidirectional reflectionless effect. This FIB‐defined bending origami proves to be a rapid fabrication approach of varied 3D configuration in micro/nanoscale with extremely flexible controllability of spatial orientation, providing more opportunities and options for various functional devices based on 3D configurations, especially for 3D metasurfaces.

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Bistable out-of-plane stress-mismatched thermally actuated bilayer devices with large deflection

Cited by 11 publications

References 20 publications

Incorporating nanomaterials with MEMS devices.

Incorporating nanomaterials with MEMS devices.

Development of a light-powered microstructure : enhancing thermal actuation with near-infrared absorbent gold nanoparticles.

Rapid Bending Origami in Micro/Nanoscale toward a Versatile 3D Metasurface

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