2019
DOI: 10.1088/1742-6596/1410/1/012013
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Biosensors based on nanowire field effect transistors with Schottky contacts

Abstract: A top-down nanofabrication approach was used to obtain silicon nanowires from silicon-on-insulator wafers using direct-write electron beam lithography and plasma-reactive ion etching. Fabricated with designed pattern silicon nanowires are 0.4, 0.8, 2 μm in width and 100 nm in height. The devices can be applied in future medical diagnostic applications as novel biosensors with detection principle based on the changes in electrical characteristics of the silicon nanowires functionalized with thiol-containing mol… Show more

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Cited by 2 publications
(2 citation statements)
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“…statistical analysis of the AFM-topograms of the surface, the fractal dimensions were calculated and the MFFC [15], method was applied, using the algorithm outlined in [16]. Dependences of the values of fractal dimensions (D f ) on the mechanical stress applied to the sample (σ ) for different areas (1,2,3), are shown in Fig. 3.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…statistical analysis of the AFM-topograms of the surface, the fractal dimensions were calculated and the MFFC [15], method was applied, using the algorithm outlined in [16]. Dependences of the values of fractal dimensions (D f ) on the mechanical stress applied to the sample (σ ) for different areas (1,2,3), are shown in Fig. 3.…”
Section: Resultsmentioning
confidence: 99%
“…At present, there is an intensive growth in research into the creation of nanomaterials and the development of nanotechnologies. This is because nanomaterials have qualitatively new properties, functional and performance characteristics that differ significantly from those of macroscopic objects [1][2][3]. The functional properties of such materials are of interest in terms of hetero-catalysis, sensorics, microelectronics and much more [4][5][6][7].…”
Section: Introductionmentioning
confidence: 99%