Bionic MEMS for Touching and Hearing Sensations: Recent Progress, Challenges, and Solutions

Ge, Chang Chun; Cretu, Edmond

doi:10.1007/s42235-022-00159-3

Cited by 6 publications

(5 citation statements)

References 135 publications

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“…The piezoelectric variation on the beam and the hydrophone sensitivity are affected by stress, while the working bandwidth is affected by the resonance frequency. During the analysis, the three assumptions should be made: (1) the cilia and the central inertial unit are rigid, and their deformation can be ignored; (2) the cilia and the central inertial unit are rigidly connected; and (3) the influence of damping is not considered. The microstructure section model was created as shown in Figure 3a.…”

Section: Stress and Resonance Frequencies Of The Cantilever Beammentioning

confidence: 99%

“…Biomimicry [1,2], as a method of studying biological systems, plays an essential role in the development of novel sensors. The sensory organs of living organisms are diverse, ranging from the touch of invertebrates to the hairs and skin of vertebrates to the hair-like sensory organs of flying insects to the lateral lines of marine organisms, and even to the sharp and precise perception of the human cochlea [3,4].…”

Section: Introductionmentioning

confidence: 99%

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Design and Implementation of a Four-Unit Array Piezoelectric Bionic MEMS Vector Hydrophone

Shi,

Zhang,

Wang

et al. 2024

Micromachines

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High-performance vector hydrophones have been gaining attention for underwater target-monitoring applications. Nevertheless, there exists the mutual constraint between sensitivity and bandwidth of a single hydrophone. To solve this problem, a four-unit array piezoelectric bionic MEMS vector hydrophone (FPVH) was developed in this paper, which has a cross-beam and a bionic fish-lateral-line-nerve-cell-cilia unit array structure. Simulation analysis and optimization in the design of the bionic microstructure have been performed by COMSOL 6.1 software to determine the structure dimensions and the lead zirconate titanate (PZT) thin film distribution. The FPVH was manufactured using MEMS technology and tested in a standing wave bucket. The results indicate that the FPVH has a sensitivity of up to −167.93 dB@1000 Hz (0 dB = 1 V/μPa), which is 12 dB higher than that of the one-unit piezoelectric MEMS vector hydrophone (OPVH). Additionally, the working bandwidth of the FPVH reaches 20 Hz~1200 Hz, exhibiting a good cosine curve with an 8-shape. This work paves a new way for the development of multi-unit piezoelectric vector hydrophones for underwater acoustic detectors.

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Section: Stress and Resonance Frequencies Of The Cantilever Beammentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and Implementation of a Four-Unit Array Piezoelectric Bionic MEMS Vector Hydrophone

Shi,

Zhang,

Wang

et al. 2024

Micromachines

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“…𝑆 𝐷 ≈ 𝜋(𝑅𝛼) 2 (2.13) In this paper the transition state between Wenzel model and Cassie-Baxter model was used. The bottom of droplet doesn't completely contact with the surface, and the gap is partially filled by air, as shown in Fig.…”

Section: Mechanism and Modeling Of Capillary Force Considering The Su...mentioning

confidence: 99%

“…With the development of science and technology, people focus on the micro and nano field, such as microelectromechanical system (MEMS) 1,2 , femtosecond laser micro and nano machining technology 3,4 , microfluidics 5,6 and so on. Effect of the interface force on these fields can't be ignored, especially the capillary force.…”

Section: Introductionmentioning

confidence: 99%

Deep understanding of the dependence between capillary adhesion behavior and meniscus Kelvin radius or interface micromorphology

Liu,

Ran

et al. 2024

Preprint

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With the structure and device entering the micro/nano scale, the interaction between micro devices is mainly governed by the interface forces. The capillary adhesion force, as the main component of the interface force, significantly affects the detection accuracy and reliability of the micro/nano measurement system. In this paper, an accurate parameterized theoretical model of the capillary force related to relative humidity considering a non-constant Kelvin equilibrium radius, as well as a model with respect to surface roughness derived from a sinusoidal characteristic microtopography under the partially infiltrated state of surface microcosmic grooves are established which can more accurately describe the capillary adhesion behavior between real workpiece surfaces. A high-sensitivity force measurement system using the probe tip on micrometre scale is developed to measure capillary forces. The experiment results demonstrate the accuracy of the theoretical models and reveal the relationship between effective distance, rate of change of the capillary force with the relative humidity or surface roughness. This work will expand the scope of understanding of the interaction effects appeared on micrometer-scale probe tips and lead to many potential applications of the interface interaction in micro- and nanotechnology.

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“…In recent years, technologies such as smart wearable devices and virtual reality have begun to enter people's lives, and people's demand for bionic tactile feedback is increasing. Many companies have also shifted their focus to haptic feedback [1][2][3][4]. At present, most of the vibration motors in consumer electronic products are realized by electromagnetic driving, such as the eccentric vibrating motor and linear vibrating motors commonly used in smart phones.…”

Section: Introductionmentioning

confidence: 99%

Research on Stacked Piezoelectric Cymbal Vibrator

Liu,

Zheng,

Guo

et al. 2023

Micromachines

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As demand for haptic feedback increases, piezoelectric materials have become one of the best candidate materials due to their small size, high electromechanical coupling coefficient, and fast response. A stacked piezoelectric cymbal vibrator is proposed based on the common cymbal-type transducer, which is composed of a piezoelectric stack to drive and a cymbal disk to amplify displacement. A coupling theoretical model between the piezoelectric stack and the cymbal-type structure is established. The longitudinal and radial displacements of the stacked piezoelectric cymbal vibrator are calculated in the low frequency range (<1000 Hz) by the theoretical model and the finite element method. The theoretical and numerical results are in good agreement. The results show that the radial displacement can be converted into longitudinal displacement and then effectively amplified by the cymbal disk with an amplification ratio of 30. The feature is conducive to its widespread application in the field of consumer electronics.

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Bionic MEMS for Touching and Hearing Sensations: Recent Progress, Challenges, and Solutions

Cited by 6 publications

References 135 publications

Design and Implementation of a Four-Unit Array Piezoelectric Bionic MEMS Vector Hydrophone

Design and Implementation of a Four-Unit Array Piezoelectric Bionic MEMS Vector Hydrophone

Deep understanding of the dependence between capillary adhesion behavior and meniscus Kelvin radius or interface micromorphology

Research on Stacked Piezoelectric Cymbal Vibrator

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