Biomimetic moth-eye nanostructures fabricated by nanosphere lithography in ZnSe enhancing transmission in the mid-infrared

Huang, Yulei; Hao, Zhou; Wang, Fangjie; Yan, Congliao; Ju, Yao; Gu, Qiongqiong; Miao, Zixiao; Cai, Rui; Sui, Xiaolin; Wu, Ziyan; Zhang, Hong; Deng, Guoliang; Zhou, Shouhuan

doi:10.1016/j.optmat.2023.113971

Cited by 6 publications

(3 citation statements)

References 47 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Many methods have been developed for preparing 1D nanostructures, such as electron beam lithography (EBL) and nanosphere lithography (NSL). 26–29 However, these methods are not suitable for preparing nanostructures with diverse directionalities and sizes. To prepare such asymmetric 1D nanostructures, a number of techniques have been developed.…”

Section: Introductionmentioning

confidence: 99%

Oriented bouncing of droplets with a small Weber number on inclined one-dimensional nanoforests

Li,

Guo,

Wen

et al. 2024

Nanoscale

View full text Add to dashboard Cite

show abstract

Section: Introductionmentioning

confidence: 99%

Oriented bouncing of droplets with a small Weber number on inclined one-dimensional nanoforests

Li,

Guo,

Wen

et al. 2024

Nanoscale

View full text Add to dashboard Cite

show abstract

“…However, lithography on curved surfaces has scarcely been researched, [24][25][26][27] although lithography for creating three-dimensional structures has been researched somewhat eagerly. [28][29][30][31][32][33][34][35] For this reason, in the present study, the authors began the research and development of lithography systems applicable to the patterning of large patterns on arbitrarily but gently curved surfaces using optics known as a magic mirror system. [36][37][38] As a result, patterns on curved reticles were successfully replicated on curved specimen surfaces.…”

Section: Introductionmentioning

confidence: 99%

Distortions of parabolic mirror optics for stereophonic lithography and prospects of compensations

Horiuchi,

Iwasaki,

Kobayashi

2024

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

The distortions of parabolic mirror optics used for stereophonic projection lithography were investigated. It has already been demonstrated that resist patterns are replicable on gently curved surfaces using mirror optics composed of faced paraboloids of revolution. However, it was found that replicated resist patterns were somewhat distorted from the original patterns. The distortions were caused by characteristics of projection optics. For this reason, the distortions were first calculated by tracing light rays. The calculation procedures are explained in detail. The calculated distortions almost coincide with the ones obtained by experiments. Next, the influences of distortions on the distributions of image intensity and replicated pattern widths were investigated. The maximum distortions reached 29% of the original size at the right-side corners of a 12 mm square, and the light intensity was lowered by 30%. For this reason, printed 200 μm pattern widths reached more than 500 μm on the right side. This was considered to be unfavorable for applying the method universally in various uses. For this reason, methods for compensating or modifying the optics distortions were investigated, and light intensity distributions were discussed.

show abstract

“…Techniques such as sputtering and vapor deposition can create material patterns; however, they alter the crystal structures of the materials. Patterning by etching the surface with corrosive liquids or electrical corrosion is another such approach, but it poses challenges in terms of the potential roughening of the entire surface and the inability to control substrate surface roughness [26]. A high-resolution, large-area patterning method for ionic crystals that is unaffected by the material and roughness of the substrate is required to advance frost research.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Silver Iodide (AgI) Patterns via Photolithography and Its Application to In-Situ Observation of Condensation Frosting

Okabe,

Tang,

Nishimura

et al. 2023

Nanomaterials

View full text Add to dashboard Cite

This study introduces an innovative photolithography-based method for patterning ionic and inorganic particle materials such as silver iodide (AgI). Conventional methods lack precision when patterning powdered materials, which limits their applicability. The proposed method stacks layers of a particle material (AgI) and negative-tone photoresist for simultaneous ultraviolet exposure and development, resulting in well-defined AgI patterns. The sintering process successfully removed binders from the material layer and photoresist, yielding standalone AgI patterns on the Si substrate with good adhesion. The pitch remained consistent with the design values of the photomask when the pattern size was changed. In-situ observation of condensation frosting on the patterns was conducted, which confirmed the practicality of the developed patterning process. This versatile method is applicable to large areas with a high throughput and presents new opportunities for modifying functional surfaces.

show abstract

Biomimetic moth-eye nanostructures fabricated by nanosphere lithography in ZnSe enhancing transmission in the mid-infrared

Cited by 6 publications

References 47 publications

Oriented bouncing of droplets with a small Weber number on inclined one-dimensional nanoforests

Oriented bouncing of droplets with a small Weber number on inclined one-dimensional nanoforests

Distortions of parabolic mirror optics for stereophonic lithography and prospects of compensations

Fabrication of Silver Iodide (AgI) Patterns via Photolithography and Its Application to In-Situ Observation of Condensation Frosting

Contact Info

Product

Resources

About