Bioinspired Triboelectric Nanogenerators as Self‐Powered Electronic Skin for Robotic Tactile Sensing

Guo, Yao; Xu, Liang; Cheng, Xiaowen; Li, Yangyang; Huang, Xin; Guo, Wei; Liu, Shaoyu; Wang, Zhong Lin; Wu, Hao

doi:10.1002/adfm.201907312

Cited by 208 publications

(169 citation statements)

References 52 publications

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“…[71] Metal materials can be directly deposited on a flexible substrate to form a conductive thin film. [72,73] Besides, these materials can serve as the conductive fillers in polymers. [74] For example, Zhao and co-workers reported a novel flexible pressure sensor consisting of a triple-layered porous PDMS/ silver nanoparticle (AgNP) sponge (Figure 5a).…”

Section: Metal Materialsmentioning

confidence: 99%

Flexible Pressure Sensors for Biomedical Applications: From Ex Vivo to In Vivo

Zheng

Chen

et al. 2020

Adv Materials Inter

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As an important branch of flexible electronics, flexible pressure sensors that combine unique advantages including light weight, flexibility, and low‐cost, have drawn extensive attention owing to their great potential for biomedical applications. In this review, the current state‐of‐the‐art flexible pressure sensors concerning common substrate and active materials, sensing mechanism, key parameters, sensitivity optimization strategies, and promising biomedical applications from ex vivo to in vivo and which results in the distinct requirements of materials and structure design is briefly reviewed. Finally, perspectives on the potential challenges of flexible pressure sensors are provided.

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Section: Metal Materialsmentioning

confidence: 99%

Flexible Pressure Sensors for Biomedical Applications: From Ex Vivo to In Vivo

Zheng

Chen

et al. 2020

Adv Materials Inter

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“…This approach is much less expensive than photolithography techniques, nevertheless it does not allow for design changes in the micro-structuring due to limitations regarding the objects available to act as molds. Several objects have been used as molds, from sandpaper [ 130 , 166 , 167 , 168 , 169 , 170 , 171 ] to paper [ 39 ], leaves of several plants’ species [ 38 , 43 , 142 , 172 , 173 , 174 , 175 , 176 , 177 ], insect wings [ 142 ], animals skin [ 178 ], and fabrics [ 140 , 179 , 180 , 181 , 182 ]. PDMS is once again the most chosen material for the micro-structured films [ 38 , 39 , 130 , 140 , 142 , 167 , 168 , 169 , 172 , 173 , 174 , 175 , 176 , 177 , 178 , 179 , 182 ], as well as PDMS-based composites with graphite [ 166 , 170 ] or carbon nanotubes (CNTs) [ 181 ].…”

Section: Pressure Sensorsmentioning

confidence: 99%

“…PDMS is once again the most chosen material for the micro-structured films [ 38 , 39 , 130 , 140 , 142 , 167 , 168 , 169 , 172 , 173 , 174 , 175 , 176 , 177 , 178 , 179 , 182 ], as well as PDMS-based composites with graphite [ 166 , 170 ] or carbon nanotubes (CNTs) [ 181 ]. For some sensors, it is common to coat PDMS films with gold [ 38 , 169 ], silver nanowires [ 39 , 173 , 176 ], rGO [ 130 , 168 ], CNTs [ 167 , 172 ], SWCNTs [ 179 ], graphene [ 172 , 174 , 175 , 182 ], and PEDOT:PSS [ 178 ] through vapor deposition methods [ 38 , 169 ], spray-coating [ 39 , 167 , 175 , 176 ], dip-coating [ 168 , 179 ], and transfer methods [ 172 , 174 , 182 ]. Polyimide […”

Section: Pressure Sensorsmentioning

confidence: 99%

“… Plasma dry etching 45.7 V kPa −1 (0–0.71) 10.6 V kPa −1 (0.71–1.25) 2.5 Pa/ 1.25 kPa 5/- 40,000 (L) -/- (♡) TE J. Zhou [ 292 ] 2018 EVA/Ag film with hollow micro-spheres (750 µm of diameter, 300 µm of height) in both surfaces, with an outer sheet of FEP/Ag. Hot pressing 18.98 V kPa −1 (0.5–1) 0.77 V kPa −1 (1.6–10) 0.25 V kPa −1 (10–40) 500 Pa/ 40 kPa -/- - -/- (♡ ) TE Z. L. Wang [ 176 ] 2019 Two PDMS films with micro-cones (25.4 µm of diameter, 25.7 µm of height) in interlocked geometry, one covered with Ag NWs and the other covered with PTFE bumps, and a back elec. Leaf as mold 127.22 V kPa −1 (5–50) 5 kPa/ 50 kPa -/- 5000 (L) -/- TE X. Chou [ 293 ] 2020 PDMS micro-frustum film (14 µm of width, 5 µm of height) covered with Cu with another PDMS micro-frustum film covered with P(VDF-TrFE) in interlocked geometry, and a spacer.…”

Section: Table A1mentioning

confidence: 99%

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Transduction Mechanisms, Micro-Structuring Techniques, and Applications of Electronic Skin Pressure Sensors: A Review of Recent Advances

Santos

Fortunato

Martins

et al. 2020

Sensors

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Electronic skin (e-skin), which is an electronic surrogate of human skin, aims to recreate the multifunctionality of skin by using sensing units to detect multiple stimuli, while keeping key features of skin such as low thickness, stretchability, flexibility, and conformability. One of the most important stimuli to be detected is pressure due to its relevance in a plethora of applications, from health monitoring to functional prosthesis, robotics, and human-machine-interfaces (HMI). The performance of these e-skin pressure sensors is tailored, typically through micro-structuring techniques (such as photolithography, unconventional molds, incorporation of naturally micro-structured materials, laser engraving, amongst others) to achieve high sensitivities (commonly above 1 kPa−1), which is mostly relevant for health monitoring applications, or to extend the linearity of the behavior over a larger pressure range (from few Pa to 100 kPa), an important feature for functional prosthesis. Hence, this review intends to give a generalized view over the most relevant highlights in the development and micro-structuring of e-skin pressure sensors, while contributing to update the field with the most recent research. A special emphasis is devoted to the most employed pressure transduction mechanisms, namely capacitance, piezoelectricity, piezoresistivity, and triboelectricity, as well as to materials and novel techniques more recently explored to innovate the field and bring it a step closer to general adoption by society.

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“…In addition, another issue generally associated with triboelectric-type sensor arrays is the crosstalk between sensor units as well as the electrodes 41,42 , arising from electrostatic induction, which significantly limits their practical application for precise position identification in response to contacting objects. Thus, great efforts have been devoted to reducing this useless crosstalk, such as introducing a dielectric shielding layer 32,43,44 or metal screening layer 45 . Nevertheless, more involved layers not only complicate the fabrication process but also may compromise the stretchability/flexibility of the device due to mismatch of the elastic modulus of different layers.…”

Section: Introductionmentioning

confidence: 99%

A metal-electrode-free, fully integrated, soft triboelectric sensor array for self-powered tactile sensing

Wang

Liu

et al. 2020

Microsyst Nanoeng

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The dramatic advances in flexible/wearable electronics have garnered great attention for touch sensors for practical applications in human health monitoring and human-machine interfaces. Self-powered triboelectric tactile sensors with high sensitivity, reduced crosstalk, and simple processing routes are highly desirable. Herein, we introduce a facile and low-cost fabrication approach for a metal-electrode free, fully integrated, flexible, and self-powered triboelectric tactile sensor array with 8-by-8 sensor units. Through the height difference between the sensor units and interconnect electrodes, the crosstalk derived from the electrodes has been successfully suppressed with no additional shielding layers. The tactile sensor array shows a remarkable sensitivity of 0.063 V kPa-1 with a linear range from 5 to 50 kPa, which covers a broad range of testing objects. Furthermore, due to the advanced mechanical design, the flexible sensor array exhibits great capability of pressure sensing even under a curved state. The voltage responses from the pattern mapping by finger touching demonstrate the uniformity of the sensor array. Finally, real-time tactile sensing associated with light-emitting diode (LED) array lighting demonstrates the potential application of the sensor array in position tracking, self-powered touch screens, human-machine interfaces and many others.

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Bioinspired Triboelectric Nanogenerators as Self‐Powered Electronic Skin for Robotic Tactile Sensing

Cited by 208 publications

References 52 publications

Flexible Pressure Sensors for Biomedical Applications: From Ex Vivo to In Vivo

Flexible Pressure Sensors for Biomedical Applications: From Ex Vivo to In Vivo

Transduction Mechanisms, Micro-Structuring Techniques, and Applications of Electronic Skin Pressure Sensors: A Review of Recent Advances

A metal-electrode-free, fully integrated, soft triboelectric sensor array for self-powered tactile sensing

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