Biocompatible Parylene-C Laser-Induced Graphene Electrodes for Microsupercapacitor Applications

Abstract

Laser irradiation of polymeric materials has drawn great attention as a fast, simple, and cost-effective method for the formation of porous graphene films that can be subsequently fabricated into low-cost and flexible electronic and energy-storage devices. In this work, we report a systematic study of the formation of laser-induced graphene (LIG) with sheet resistances as low as 9.4 Ω/sq on parylene-C ultrathin membranes under a CO2 infrared laser. Raman analysis proved the formation of the multilayered graphenic material, with I D/I G and I 2D/I G peak ratios of 0.42 and 0.65, respectively. As a proof of concept, parylene-C LIG was used as the electrode material for the fabrication of ultrathin, solid-state microsupercapacitors (MSCs) via a one-step, scalable, and cost-effective approach, aiming at future flexible and wearable applications. The produced LIG-MSC on parylene-C exhibited good electrochemical behavior, with a specific capacitance of 1.66 mF/cm2 and an excellent cycling stability of 96% after 10 000 cycles (0.5 mA/cm2). This work allows one to further extend the knowledge in LIG processes, widening the group of precursor materials as well as promoting future applications. Furthermore, it reinforces the potential of parylene-C as a key material for next-generation biocompatible and flexible electronic devices.

Transdermal drug delivery using a porous microneedle device driven by a hydrogel electroosmotic pump

“…Parylene C is a superior barrier layer that protects from moisture, corrosion, and airborne contaminants. 24 Applied as a vapor, the coating layer perfectly conforms to complex shapes and provides complete and even coverage. As illustrated in Fig.…”

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“…The authors demonstrated proof-of-concept electrodes for electrochemical sensors, strain sensors, and in-plane MSCs by using this method. Correia et al 74 studied the formation of LIG on ultrathin parylene-C membranes using CO 2 infrared laser irradiation (Figure 5b). Optimizing laser parameters, they achieved LIG formation with low resistance, reaching values as low as 9.4 Ω/sq.…”

“…(b) Schematic of assembling Parylene-C film LIG-MSC electrodes created with laser-writing. Reproduced with permission from ref . Copyright 2022 American Chemical Society.…”

Room temperature operated flexible La-ZnO/MWCNTs sensor for ppb level carbon monoxide detection

“…Figure 2(C) displays the SEM images of the PI sheets, which seem to have a low porous carbon structure. Increasing porosity is directly linked to gas release during laser graphitization [20]. Higher laser power means more gas is released from the photothermal conversion, resulting in larger pore distribution and undesirably higher porosity in flexible sensors.…”