Bimodal range distributions of low-energy carbon ions in tetrahedral amorphous carbon

Abstract

Range and mixing distributions of carbon ions deposited onto tetrahedral amorphous carbon films at kinetic energies between 22 eV and 692 eV are measured utilizing high-resolution elastic recoil detection. These data are compared to respective calculations based on binary collision approximation as well as to classical molecular-dynamics simulations. The measured range profiles reveal asymmetric, bimodal structures which are not reproduced from theories. The measured mixing distributions approve the measured range distributions, in particular the observed differences between theory and experiment, which have to be considered in subplantation growth models.

Electrical characterization of conductive ion tracks in tetrahedral amorphous carbon with copper impurities

“…The growth by subimplantation (chapter 2.2) causes an intermixing at the interfaces. The mixing range is in the order of 1 nm to 2 nm in accordance with experiments by Neumaier et al [49]. The TEM image suggests a slight intermixing at the interfaces as well, the width is about 2 nm being in accordance to the findings of Neumaier et al and SRIM simulations.…”

“…The carbon ions with 20 eV to 200 eV have a range of 0.5 nm to 1.5 nm according to SRIM [48]. An in-depth study of ion range during a-C deposition has been performed by Neumaier et al [49]. The energy is mainly lost by nuclear stopping (chapter 2.…”

Self-Organized Formation of Metal-Carbon Nanostructures by Hyperthermal Ion Deposition

“…Taking gold ions bombarding an a-C:Au film with a gold concentration of 20 at.% as an example yields the following: 100 eV Au + ions penetrate about 1.3 nm with a straggling of 0.5 nm while 20 eV ions still have an ion range of 0.9(3) nm. Although SRIM was developed for ion implantation, the calculated ion ranges for low-energy ions are reasonably accurate [113]. Furthermore, the focus here is not on the exact values but on the comparison, which in the example above results in a factor of only 1.4 in the ion ranges.…”