x :H sextuple-junction solar cells were prepared by the PE-CVD. The solar cell has a structure in which both sides are sandwiched between ITO layers, and the structure allows light irradiation from both sides.A total of 49 cells having an area of 0.25 cm 2 , 0.5 cm 2 , and 1 cm 2 was fabricated on a 10 cm × 10 cm substrate. The distribution of open-circuit voltage, V oc , under low illu-