Bidirectional properties of TiC, TiN and TiNC thin films deposited by radio frequency magnetron sputtering

Abstract

BACKGROUND: Titanium nitride (TiN), titanium carbide (TiC) and titanium carbonitride (TiNC) thin films show promising practical applications due to their photoelectric properties and corrosion behaviour. OBJECTIVE: In this work, we investigated the factors which may affect the optical properties and the corrosion behaviour of these coatings. METHODS: The titanium coatings were carried out by sputtering using the target of Ti6Al4V (purity 99.96%) with different N2, CH4 and Ar partial pressures. XRD, FTIR, Raman and SEM with EDX studies show the formation of titanium nitride, titanium carbide coatings. Uv-vis spectroscopy was carried out to estimate the optical properties using the numerical Swanepoel method. Potentiodynamic polarization studies in Hank’s solution show that the corrosion resistance is found to be in the order of C-TiN(2) > C-TiN(1) > TiN > TiC. RESULTS: A high protective efficiency was determined (60%) when comparing TiNC(2) and TiC corrosion current densities, which confirms the lower corrosion velocity and the higher passivation stability of the coatings composed with TiN and TiC phases. Electrochemical impedance spectroscopy studies show that the Rct increases in the following order: TiC < TiN < C-TiN(1) < C-TiN(2), highlighting the fact that C-TiN(2) coating has the higher corrosion resistance.

Simultaneous Carburization, Oxidation, and Nitridation of Titanium Surface Using Ablation by Femtosecond Laser in n‐Heptane

“…[54,55] The clear fingerprints of the N ¼ C ¼ N and C-N vibrations are the characteristic peaks at approximately 2020, 2100, and 2320 cm À1 . [54][55][56] The ATR spectra also show the characteristic signal of C-H vibration at approximately 2900 cm À1 , in agreement with the Raman spectra. A surprising result is the very small intensity of O-H and N-H bands at wavenumbers above 3000 cm À1 , although the characteristic peaks due to these bands are present in the Raman spectra (see above).…”

Electrochemical Performance of Biocompatible TiC Films Deposited through Nonreactive RF Magnetron Sputtering for Neural Interfacing

“…Consequently, this combination is now acknowledged as the optimal sputtering condition within the scope of this study. The areal capacitance value obtained in this study surpasses the findings reported in a recent publication on the TiC thin film deposited through sputtering for protective coating application (124.39 μF/cm 2 ) . Additionally, it shows a comparable value to sputtered films used in supercapacitor applications, with only 1 order of magnitude lower (1500 μF/cm 2 ) .…”

“…The areal capacitance value obtained in this study surpasses the findings reported in a recent publication on the TiC thin film deposited through sputtering for protective coating application (124.39 μF/cm 2 ). 13 Additionally, it shows a comparable value to sputtered films used in supercapacitor applications, with only 1 order of magnitude lower (1500 μF/ cm 2 ). 26 This highlights its superior performance compared to the limited existing research in this field.…”

“…To this end, transition metal carbides (TMCs), particularly titanium carbide (TiC) in various forms, such as two-dimensional (2D) layer (MXene), − nanoparticles, , thin films, − and nanofibers, , have shown exceptional electrochemical properties. These properties have found application across a diverse spectrum, spanning from energy storage to bioelectronics devices. , Among those forms, only Ti 3 C 2 MXene has been recently suggested as a neural electrode material due to its remarkably high areal capacitance (100–300 mF/cm 2 ), , outstanding electrical conductivity (∼10 000 S/cm) 2 , very low impedance, and good in vivo neural recording performance .…”

Boosting Thermal and Mechanical Properties: Achieving High‐Safety Separator Chemically Bonded with Nano TiN Particles for High Performance Lithium‐Ion Batteries

“…[23] The Fourier transform infrared (FT-IR) spectrum (Figure 2b) shows a characteristic peak of TiN at 600 cm −1 , corresponding to the vibrational stretching mode of TiN. [24] For PVDF-HFP, there are two characteristic bands at 408 and 614 cm −1 , corresponding to the α-phase of PVDF-HFP. [22] Meanwhile, the peaks at 485 and 1174 cm −1 represent the rocking and bending vibrations of the CF 2 and CF 3 groups in PVDF-HFP, respectively.…”