2007
DOI: 10.1021/nl0706244
|View full text |Cite
|
Sign up to set email alerts
|

Biaxially Stretchable “Wavy” Silicon Nanomembranes

Abstract: This Letter introduces a biaxially stretchable form of single crystalline silicon that consists of two dimensionally buckled, or "wavy", silicon nanomembranes on elastomeric supports. Fabrication procedures for these structures are described, and various aspects of their geometries and responses to uniaxial and biaxial strains along various directions are presented. Analytical models of the mechanics of these systems provide a framework for quantitatively understanding their behavior. These classes of material… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

3
320
0
3

Year Published

2008
2008
2016
2016

Publication Types

Select...
5
3

Relationship

1
7

Authors

Journals

citations
Cited by 369 publications
(326 citation statements)
references
References 24 publications
3
320
0
3
Order By: Relevance
“…The demonstration by the group of J.A. Rogers, that also silicon nanomembranes 34 and other layered materials can be wrinkled to withstand large tensile deformations 35,36 , rendered functional electronic components and entire logic circuits to become stretchable 9 . A large variety of compliant organic and inorganic electronic elements with various functions have been realized in the last years, which are summarized in figure 1.1.…”
Section: A Brief Review On Stretchable Electronicsmentioning
confidence: 99%
See 2 more Smart Citations
“…The demonstration by the group of J.A. Rogers, that also silicon nanomembranes 34 and other layered materials can be wrinkled to withstand large tensile deformations 35,36 , rendered functional electronic components and entire logic circuits to become stretchable 9 . A large variety of compliant organic and inorganic electronic elements with various functions have been realized in the last years, which are summarized in figure 1.1.…”
Section: A Brief Review On Stretchable Electronicsmentioning
confidence: 99%
“…Furthermore, it can lead to biaxial stretchability if the elastomeric substrate is pre-stretched in both lateral dimensions 36 . As shown in figure 2.13c, these features have led to the design of more functional and highly integrated stretchable electronic systems relying on surface wrinkling 9,13,40,41 .…”
Section: Surface Wrinklingmentioning
confidence: 99%
See 1 more Smart Citation
“…将无 机半导体(包括电子元件和连接电路)组装在可拉伸的器 件上. 与众不同的是, 高杨氏模量机械平面层的张力是 可以忽略的, 而复杂的波浪结构吸收了基底压缩-舒张 过程中产生的大部分拉伸应变 [31] . 这种岛-桥设计首次 显著提高了传感器的可拉伸性; 这种设计中, 刚性大的 活动模块作为浮动的岛屿, 刚性小的连线充当拉桥 [32] .…”
Section: 柔性基底unclassified
“…Metal films on PDMS, however, can sustain only limited stretching, and the stable and durable deposition of metal onto PDMS surfaces poses a great challenge. Several ingenious solutions to this problem have been described, including an accordionlike structure 18,19 , a meandering-shaped thin metal conductor on the PDMS surface 3,12,17,[19][20][21] , bonding of two-dimensional stretchable Si nanomembranes onto elastomeric PDMS slabs, or printing of elastic conductors comprising single-walled nanotubes on elastic substrates [22][23][24] . Although these technologies have contributed greatly to the development of flexible electronics, each of them still has their limits (for example, complicated fabrication processes, and direct bonding of commercialized components on highly stretching substrates).…”
mentioning
confidence: 99%