2013
DOI: 10.1016/j.matlet.2013.03.114
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Bias deposition of nanoporous Cu thin films

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Cited by 6 publications
(3 citation statements)
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“…[25]. In this bias deposition, the tip charging effect [25,26] was demonstrated to dominate the formation process of the PNFs. To investigate the physical and chemical instabilities of the as-prepared Cu2O PNFs, several kinds of heating treatments such as rapid thermal processing (RTP), high vacuum annealing (HVA), dry-oxygen oxidation and wet-oxygen oxidation were respectively carried out at 200-500 ℃ for a duration of 30 min.…”
Section: Methodsmentioning
confidence: 80%
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“…[25]. In this bias deposition, the tip charging effect [25,26] was demonstrated to dominate the formation process of the PNFs. To investigate the physical and chemical instabilities of the as-prepared Cu2O PNFs, several kinds of heating treatments such as rapid thermal processing (RTP), high vacuum annealing (HVA), dry-oxygen oxidation and wet-oxygen oxidation were respectively carried out at 200-500 ℃ for a duration of 30 min.…”
Section: Methodsmentioning
confidence: 80%
“…Cu 2 O thin films of a triangular pyramids-like PNF structure were fabricated on glass slide substrates by a radio-frequency balanced magnetron sputtering approach at a substrate bias voltage of +50 V. The film thickness was uniformly controlled to be ∼240 nm and other fabrication details can be found in [25]. In this bias deposition, the tip charging effect [25,26] was demonstrated to dominate the formation process of the PNFs. To investigate the physical and chemical instabilities of the as-prepared Cu 2 O PNFs, several kinds of common heating treatments such as rapid thermal processing (RTP), high vacuum annealing (HVA), dry oxygen oxidation and wet-oxygen oxidation (considering the work environment of Cu 2 O and related devices and further referencing to the oxidation approaches of silicon wafers) were respectively carried out at 200 °C-500 °C for a duration of 30 min.…”
Section: Methodsmentioning
confidence: 99%
“…Future studies might include the use of grazing-incidence small-angle X-ray scattering as already demonstrated for nanoprisms prepared using sputtering [ 22 ]. They should also include the solid-state studies and, when micro- and nano-focussed X-ray beam are available, the micrometer size details in patterned structures such as microwires of silver composites [ 23 ].…”
Section: Discussionmentioning
confidence: 99%