BEOL Cu Gap-fill Performance Improvement for 14nm Technology Node

Zeng, Zhaoqin; Bao, Yu; Cao, Yanpeng; Xue, Xingkun; Xu, Jianhua; Zhang, Yanyan; Wang, Xiaofang; Fang, Jingxun; Zhang, Yu

doi:10.1109/cstic49141.2020.9282574

2020 China Semiconductor Technology International Conference (CSTIC) 2020

DOI: 10.1109/cstic49141.2020.9282574

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BEOL Cu Gap-fill Performance Improvement for 14nm Technology Node

Zhaoqin Zeng

Yu Bao

Yanpeng Cao

et al.

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BEOL Cu Gap-fill Performance Improvement for 14nm Technology Node

Cited by 1 publication

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