Bending mode cantilever actuators for micro-electromechanical systems

Morega, Alexandru M.; Tanase, Nicolae; Morega, Mihaela; Comeaga, Daniel; Ilie, Cristinel

doi:10.1109/atee.2015.7133869

Cited by 9 publications

(9 citation statements)

References 22 publications

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“…The paper presents a novel concept of an electromagnetic pressure microsensor, designed for low pressure pneumatic applications. The core concept of this sensor took shape when was proposed a new type of MEMS electromagnetic actuator [1,2] consisting of a cantilever with a micro-magnets array at its free end and a fixed planar coil or set of coils, disposed parallel with the cantilever and positioned at a fixed distance from it (Fig. 1).…”

Section: Introductionmentioning

confidence: 99%

A Novel Concept of Electromagnetic Pressure Sensor based on Impedance Variation for Pneumatic Applications

Alina¹,

Daniel²,

Alexandru³

2019

MATEC Web Conf.

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The core concept of the proposed sensor relies on the architecture of a new type of microscale electromagnetic actuator, previously developed and tested. Previous studies were focus on conceptual design, modelling and simulation and application as an actuator for static and dynamic purposes. Upon presenting the device functioning principle and design, the authors propose a new application of this device, as a detection element, due to its electrodynamic behavior that allows the correlation of displacements and deformations with the variation of the device coil inductance. This dependency could also be used as a feedback information, allowing a closed loop control without an aditional sensorial element. A series of numerical models have been developed and computed in order to test the sensorial properties of the device and to describe the functioning principle as a detection element. The models have been computed using two materials for the sensor’s mobile element, to test if the manufacturing costs can be lowered by using a material without magnetic properties and the conclusions of the studies have also been drawn. Once the sensor behavior and the structural materials have been concluded, a sensor model has been developed and studied using FEM. Further on, one of the sensor constructive parameters has been varied in relation to the desired measuring range and the future research directions have been drawn.

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Section: Introductionmentioning

confidence: 99%

A Novel Concept of Electromagnetic Pressure Sensor based on Impedance Variation for Pneumatic Applications

Alina¹,

Daniel²,

Alexandru³

2019

MATEC Web Conf.

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“…The proposed design is provided with a fixed coil and a moving micro-magnets array and the actuation is achieved through the electrodynamic interaction between the permanent micro-magnets array and the electric current in the coils. The actual design advantages were discussed in previous papers [6,7], deduced based on modeling and simulation.…”

Section: Introductionmentioning

confidence: 99%

Micro Electromagnetic Actuator - Static Behavior

Comeaga

Ovezea²,

Ilie³

2018

MATEC Web Conf.

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The article presents a comparative study regarding the design and experimental results for a miniature electromagnetic actuator with a modified design comparing with the classical type, including a mobile array of micro-magnets and a fixed coil in two configurations (planar spiral multi-layered and cylindrical). Previous work on design, modeling and simulation of this type of actuator indicated the optimum design and conducted to dimensions and material parameters. Different types of actuators were produced and experimentally tested, showing good results but also some drawbacks. Three of these design solutions are presented together with the static voltage-deflection and electrical impedances curves, experimentally derived. The results confirmed the feasibility of two actuating solution, showing good linearity and possibility to control the position at h accuracy and indicated improving directions.

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“…As it is practically impossible to change the magnetization in the surface of magnets matrix at this scale (the permanent magnet(s) are deposited in one step and the magnetization is obtained either in this step or in an additional step, but is impossible to produce a strong and fast varying magnetization field at microscale) the single solution could be the usage of a special design for the coil. The simplest EA solution is based on an elastic beam [5][6] but proved to provide only low rotational angles of the mirror.…”

Section: The Electromagnetic Actuator In Memsmentioning

confidence: 99%

“…The model parameters were derived through simulation using finite element methods [3,5,6]. The model assumes also a non-zero initial state, described by initial positions and forces at equilibrium.…”

Section: The Simulink Modelsmentioning

confidence: 99%

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Modelling and Simulation for Control of a Mems Electromagnetic Scanner

2017

IJOMAM

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Abstract:The article presents the mathematical modelling and simulation models of a MEMS electromagnetic scanning system, with the aim to discuss sources of nonlinear behavior and to compare voltage vs. current control modes. The electromagnetic (EM) actuators develop high forces at any scale, and can be used at both resonance or far from it. This study completes previous design and manufacturing work of the electro-mechanical structure and its electric supply circuits. A nonlinear mathematical model for a general case, with the main actuator connected to a second elastic system carrying the mirror, and the particular mathematical model for infinite contact impedance between the actuator and the mirror support, allowing use of a single degree of freedom model for the mechanical part, are presented. The models are simplified for current control strategy discussion, and their SIMULINK implementation is included altogether with the results of simulations that confirm the advantages of the current control.

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Bending mode cantilever actuators for micro-electromechanical systems

Cited by 9 publications

References 22 publications

A Novel Concept of Electromagnetic Pressure Sensor based on Impedance Variation for Pneumatic Applications

A Novel Concept of Electromagnetic Pressure Sensor based on Impedance Variation for Pneumatic Applications

Micro Electromagnetic Actuator - Static Behavior

Modelling and Simulation for Control of a Mems Electromagnetic Scanner

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