Benchmark of numerical versus analytical proximity curve calculations

Abstract

For the technology development of microlithography various optical simulation tools are established as a planning and development tool. Depending on the application, various numerical approximation schemes are used to tradeoff accuracy versus speed. Determining the correct numerical setting is often a tricky task as it is a compromise between these two contrary properties. In our study, we compare the numerical accuracy of two optical simulators, Solid-E as a representative for simulators for technology development and Mentor Calibre as design-for-manufacturing and optical proximity correction (OPC) tool. Calibre uses a coherent kernel approximation for performing fast simulations. As a measure for the simulation accuracy, we use the root-mean-square error criterion of a linearity curve compared to an analytical reference simulation.