2008
DOI: 10.1063/1.2831693
|View full text |Cite
|
Sign up to set email alerts
|

Behavior of stress induced leakage current in thin HfOxNy films

Abstract: The behavior of stress induced leakage current (SILC) in thin HfOxNy films is investigated. Except for the H dispersive transport process, the electron trapping process is responsible for the SILC generation in HfOxNy dielectric. This trapping process is severely modulated by temperature, thickness, and stress polarity. The recovery of SILC also proves the influence of trapping process to SILC.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3

Citation Types

2
15
0

Year Published

2010
2010
2015
2015

Publication Types

Select...
5
1

Relationship

0
6

Authors

Journals

citations
Cited by 17 publications
(18 citation statements)
references
References 19 publications
2
15
0
Order By: Relevance
“…It is clear that for a ≥ 1 there exists only the trivial solution b2 a = 1, and the transmission probability can reach in this case its maximum value T I,σ2 = 1 for β = ± π 2 (τ = ±1). It is amazing to note that our result (28) indeed looks similar to the expression (26), derived in paper [16] as a low energy limit in a much more involved calculation. By identifying the expressions b 2 /a = τ 2 /τ 2 1 = x, it thus could be suggested that the coefficients a, b 2 in our pseudopotential model effectively correspond to the hopping parameter quantities τ 2 1 , and τ 2 , respectively.…”
Section: Scalar Potential Barrier [22]supporting
confidence: 86%
See 4 more Smart Citations
“…It is clear that for a ≥ 1 there exists only the trivial solution b2 a = 1, and the transmission probability can reach in this case its maximum value T I,σ2 = 1 for β = ± π 2 (τ = ±1). It is amazing to note that our result (28) indeed looks similar to the expression (26), derived in paper [16] as a low energy limit in a much more involved calculation. By identifying the expressions b 2 /a = τ 2 /τ 2 1 = x, it thus could be suggested that the coefficients a, b 2 in our pseudopotential model effectively correspond to the hopping parameter quantities τ 2 1 , and τ 2 , respectively.…”
Section: Scalar Potential Barrier [22]supporting
confidence: 86%
“…in [14,16,24,25]. In [16] the authors with the use of the tight-binding lattice model and the Green function formalism obtained the following result for the transmission probability in the low energy limit…”
Section: Scalar Potential Barrier [22]mentioning
confidence: 97%
See 3 more Smart Citations