Highly-oriented, multi-walled carbon nanotubes were grown on polished polycrystalline and single crystal nickel substrates by plasma enhanced hot filament chemical vapor deposition at temperatures below 666°C. The carbon nanotubes range fiom 10 to 500 nm in diameter and 0.1 to 50 pm in length depending on growth conditions. Acetylene is used as the carbon source for the growth of the carbon nanotubes and ammonia is used for dilution gas and catalysis. The plasma intensity, acetylene to ammonia gas ratio and their flow rates, etc. affect the diameters and uniformity of the carbon nanotubes. [2]. Nanotube alignment is particularly important to enable both fundamental studies and applications, such as flat panel displays, vacuum microelectronics, chargeable batteries, etc. However, only one report exists on the growth of aligned carbon nanotubes by thermal decomposition of acetylene in nitrogen gas at temperature above 700°C on mesoporous silica containing iron nanoparticles [6] before our report on growth of large arrays of well-aligned carbon nanotubes on glass [16]. Here we report the growth of highly-oriented, multi-walled carbon nanotubes on nickel substrates at low temperatures by the same method (plasma enhanced hot tungsten-filament chemical vapor deposition) described in our previous paper [16]. The motivation to grow carbon nanotubes on Ni substrates is for the applications of using carbon nanotubes as battery electrodes and energy storage. We use acetylene (C2H2) to provide carbon for the growth of the carbon nanotubes and ammonia (NH3) gas for both dilution gas and catalysis. The catalytic role of ammonia is discussed in our previous paper [ 161.The base pressure of the deposition chamber is < 6 x Torr. We grew carbon nanotube films in a pressure of 1 -20 Torr maintained by flowing acetylene and ammonia gases with a total flow rate of 120 -200 sccm. We varied the acetylene-to-ammonia volume ratio fiom 1 : 2 to 1 : 10 for different experimental runs. Both polished polycrystalline and single-crystal Ni substrates were used. After stabilizing the working pressure, the tungsten filament coil powered by a DC source and the plasma-generator were turned on to generate heat and plasma. Under the present experimental set-up, the temperature of samples is estimated to be below 666 "c (which is the strain point of the display glass provided by Corning Inc.) since the display glass sit side by side with the Ni did not show any noticeable deformation after the experiments [ 161 and also Ni is not red-hot by visual observation. Growth durations were fiom 10 min to 5 h depending on the desired carbon nanotube lengths. Samples were examined by scanning electron microscopy (SEM, Hitachi S-4000) to measure tube lengths, diameters, site distributions, alignment, density and uniformity. High-resolution transmission electron microscopy (TEN was used to determine 2 the microstructure of individual tubes. Samples were also examined by x-ray diffraction, Raman spectroscopy, and x-ray photoemission spectroscopy to stud...