2002
DOI: 10.1117/1.1511531
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Beam selector dependent on incident angle by guided-mode resonant subwavelength grating

Abstract: Guided-mode resonances in subwavelength gratings are strongly dependent on incident angles. A beam selector with high sensitivity is designed based on this property. A guided-mode resonant silicon nitride (Si 3 N 4 ) grating on a silicon dioxide (SiO 2 ) substrate is presented as an example of such a device with a 1.55 m wavelength. The calculated reflection resonance has an incident angle FWHM of ⌬ϳ0.0042 radians, and a normal-incident peak efficiency of ϳ99.9%. In addition, we propose that this type of beam … Show more

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Cited by 6 publications
(2 citation statements)
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References 12 publications
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“…To calculate the total reflected wave represented by a phaser sum of all externally propagating field components, the rigorous coupled-wave analysis derived from Maxwell's equations is a general method, [26][27][28][29] without respect to correspond to the TE 30 and the TM waveguide modes. The simulation for biosensor design is theoretically analyzed according to rigorous coupled mode analysis (RCWA), 31,32 which is to optimize the major parameters in GMR device, such as duty cycle, grating depth, waveguide depth and so on, to prove the detection limits, the line width of the central wavelength. [33][34][35][36][37][38] In this work, it has tried to design a novel setup of the GMR device which is a major element to detect the depth (or refractive index) changes in biosensor and to combine with the microfluidic system to achieve the real-time monitoring.…”
Section: Model and Simulation For Gmrmentioning
confidence: 99%
“…To calculate the total reflected wave represented by a phaser sum of all externally propagating field components, the rigorous coupled-wave analysis derived from Maxwell's equations is a general method, [26][27][28][29] without respect to correspond to the TE 30 and the TM waveguide modes. The simulation for biosensor design is theoretically analyzed according to rigorous coupled mode analysis (RCWA), 31,32 which is to optimize the major parameters in GMR device, such as duty cycle, grating depth, waveguide depth and so on, to prove the detection limits, the line width of the central wavelength. [33][34][35][36][37][38] In this work, it has tried to design a novel setup of the GMR device which is a major element to detect the depth (or refractive index) changes in biosensor and to combine with the microfluidic system to achieve the real-time monitoring.…”
Section: Model and Simulation For Gmrmentioning
confidence: 99%
“…The major label-free methods actually are including the surface plasmon resonance (SPR) [1][2][3], grating couplers, ellipsometry [4][5], and guided-mode resonance (GMR) sensor [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20]. Among those, the guided-mode resonance (GMR) sensor takes more advantages of compact structure and instant measuring.…”
Section: Introductionmentioning
confidence: 99%