BBE: hierarchical computation of 3-D interconnect capacitance with BEM block extraction

Abstract

Abstract-Fast and accurate interconnect parasitic parameter extraction has become increasingly critical for verification and analysis in VLSI today. In this paper, a fast hierarchical extraction approach based on Boundary Element Method (BEM) is presented for 3-D parasitic capacitance computation. Hierarchical partition of the 3-D field creates many parts which are called 3-D BEM blocks. After combining all the 3-D BEM blocks, the capacitance matrix for a given set of nets can be computed by applying the boundary conditions. Numerical results shows that this method performs many times faster than the 3-D field solver, with equal accuracy.